Surface sputtering with nanoclusters: The relevant parameters

A. Delcorte, O. A. Restrepo, B. Czerwinski, B. J. Garrison

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

In this contribution, we compare the results of our recent molecular dynamics simulations with data already published by us and by other authors to identify the relevant physical parameters governing observables such as the range, the damaged volume, the crater shape, the sputtering yield, the emission of molecules and fragments, and the chemical reactions induced in organic solids by cluster projectiles. Among the considered physical quantities, we show for instance that the total cluster energy, the energy per atom/per nucleon in the cluster and, importantly, the mass matching between the cluster and target constituents have a major effect on the physics of the interaction. The evolution of the observables as a function of these basic physical parameters is illustrated and discussed as well as certain implications for organic surface characterization using cluster ion beams.

Original languageEnglish (US)
Pages (from-to)9-13
Number of pages5
JournalSurface and Interface Analysis
Volume45
Issue number1
DOIs
StatePublished - Jan 2013

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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