Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

D. Katz, S. W. Lee, D. Lopez, A. Kornblit, H. Grebel

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The authors have successfully fabricated carbon nanotubes bridges (intraconnects) between predetermined layouts of metal tip electrodes, taking advantage of the tips as leading catalytic points. Overall, the authors have demonstrated a yield of 15%-30% depending on the process parameters and electrode layout. They used two deposition methods: chemical vapor deposition (CVD) and plasma enhanced CVD (PECVD). Bridges could be fabricated with only CVD. The authors used carbon monoxide (CO) for the CVD process; the PECVD, however, required a mixture of CO and H2. Ethanol was successfully used with both deposition methods.

Original languageEnglish (US)
Pages (from-to)1191-1196
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number4
DOIs
StatePublished - 2007

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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