Synthesis of controllably grown carbon nanotubes interconnects

Seon Woo Lee, David Katz, Avi Kornblit, Daniel Lopez, Haim Grebel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Carbon nanotube (CNT) intra-connects (bridges spanning across in-plane electrodes) were fabricated. We have assessed several growth methods for these intra-connects: Plasma Enhanced Chemical Vapor Deposition with CO precursor (PECVD/CO), CVD/ethanol and pyrolitic CVD/CO. PECVD/CO has been used with a mixture of CO/H2 at relatively low temperatures. Its yield was relatively low and quality of the intra-connects was not to par. CVD/ethanol resulted in many more multi-wall carbon nanotubes (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CVD/CO was the most effective and simplest way to grow CNT intra-connects among the three methods, yielding well-aligned and straight SWCNT bridges.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires
PublisherMaterials Research Society
Pages44-48
Number of pages5
ISBN (Print)9781605604251
DOIs
StatePublished - 2007
EventApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1018
ISSN (Print)0272-9172

Other

OtherApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/9/074/13/07

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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