Synthesis of two dimensional materials for beyond graphene devices

Kehao Zhang, Sarah Eichfeld, Jacob Leach, Bob Metzger, Yu Chuan Lin, Keith Evansb, Joshua A. Robinson

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations


In this paper, we present an overview of the currently employed techniques to synthesize two-dimensional materials, focusing on MoS2 and WSe2, and summarize the progress reported to-date. Here we discuss the importance of controlling reactor geometries to improve film uniformity and quality for MoS2 through a combination of modeling and experimental design. In addition, development of processes scalable to provide wafer scale uniformity is explored using synthesis of WSe2 via metal-organic chemical vapor deposition. Finally, we discuss the impact of each of these processes for TMD synthesis on epitaxial graphene.

Original languageEnglish (US)
Article number94670O
JournalProceedings of SPIE - The International Society for Optical Engineering
Issue numberJanuary
StatePublished - 2015
Event2015 Micro- and Nanotechnology (MNT) Sensors, Systems, and Applications VII Conference - Baltimore, United States
Duration: Apr 20 2015Apr 24 2015

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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