SYSTEM FOR TRANSFERRING SAMPLES BETWEEN CHAMBERS IN UHV.

T. Fleisch, A. T. Shepard, T. Y. Ridley, W. E. Vaughn, N. Winograd, W. E. Baitinger, G. L. Ott, W. N. Delgass

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Abstract

This system provides right angle or end-on transfer of a sample holder from one chamber to another at ultrahigh-vacuum conditions. A convenient mechanical coupling and uncoupling device and magnetically driven transfer rods allow movement of the sample-holder assembly over distances up to 150 cm. The room-temperature holder accommodates two samples. The heatable assembly includes contacts for resistive heating of the sample to temperatures above 1800 K and thermocouple reading of sample temperatures.

Original languageEnglish (US)
Pages (from-to)1756-1760
Number of pages5
JournalJ VAC SCI TECHNOL
Volume15
Issue number5
DOIs
StatePublished - Jan 1 1978

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Fleisch, T., Shepard, A. T., Ridley, T. Y., Vaughn, W. E., Winograd, N., Baitinger, W. E., Ott, G. L., & Delgass, W. N. (1978). SYSTEM FOR TRANSFERRING SAMPLES BETWEEN CHAMBERS IN UHV. J VAC SCI TECHNOL, 15(5), 1756-1760. https://doi.org/10.1116/1.569840