Temperature dependence of the piezoelectric response in lead zirconate titanate films

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Abstract

The wafer fleure technique was modified to allow measurement of the e31f coefficient of films as a function of temperature between -55 and 85°C. Within films of a given composition, the thickest films exhibited the highest temperature dependences. This paper discusses and identifies the potential contributors to the measured variation in electromechanical response of the PZT films between -55 and 85°C.

Original languageEnglish (US)
Pages (from-to)1397-1406
Number of pages10
JournalJournal of Applied Physics
Volume95
Issue number3
DOIs
StatePublished - Feb 1 2004

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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