The wafer fleure technique was modified to allow measurement of the e31f coefficient of films as a function of temperature between -55 and 85°C. Within films of a given composition, the thickest films exhibited the highest temperature dependences. This paper discusses and identifies the potential contributors to the measured variation in electromechanical response of the PZT films between -55 and 85°C.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)