In this paper, we describe an analytical model to define the temperature-time- transformation (TTT) diagram of sol-gel deposited Pb(Zr,Ti)O3 thin films on platinized silicon substrates. Texture evolution in film occurred as the pyrolysis and thermal annealing conditions were varied. We demonstrate that the developed model can quantitatively predict the outcome of thermal treatment conditions in terms of texture evolution. Multinomial and multivariate regression techniques were utilized to create the predictor models for TTT data. Further, it was found that multinomial regression can provide better fit as compared to standard regression and multivariate regression. We have generalized this approach so that it can be applied to other thin film deposition techniques and bulk ceramics.
|Original language||English (US)|
|Journal||Journal of Applied Physics|
|State||Published - Jul 1 2011|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)