Template-based and template-free preparation of nanostructured parylene via oblique angle polymerization

Gökhan Demirel, Niranjan Malvadkar, Melik C. Demirel

Research output: Contribution to journalArticle

26 Scopus citations

Abstract

Parylene is an important class of polymer thin film that has wide-ranging applications due to its well-recognized properties, such as low-dielectric constant, biocompatibility, and exceptional barrier properties. Here, we studied the deposition of parylene nanofibers by template-based and template-free methods, which combine both vapor deposition polymerization and oblique angle deposition. A comparative study of two approaches based on surface characterization techniques is presented. These nanofibers, deposited by both approaches, have potential applications in catalysis, biodetection, and biomedical coatings.

Original languageEnglish (US)
Pages (from-to)4252-4255
Number of pages4
JournalThin Solid Films
Volume518
Issue number15
DOIs
StatePublished - May 31 2010

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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