Templating water stains for nanolithography

Wei Ssu Liao, Xin Chen, Jixin Chen, Paul S. Cremer

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

Herein, a nanoscale patterning technique is demonstrated for creating twin features in polymers and metals. The process works by combining evaporative staining with a templating process. Well-ordered hexagonally arrayed double rings were fabricated using hydrophobic spherical templates. The diameter of the rings, the width of individual rings, and the spacing between concentric and adjacent rings could be tuned by varying the solution conditions. Arrays could be made without the outer ring by employing hydrophilic templates.

Original languageEnglish (US)
Pages (from-to)2452-2458
Number of pages7
JournalNano letters
Volume7
Issue number8
DOIs
StatePublished - Aug 2007

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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