Temporal modulation of x-rays using MEMS micromirrors

Deepkishore Mukhopadhyay; Donald Walko; Il Woong Jung; Jin Wang; Gopal Shenoy; Daniel López

doi:10.1109/TRANSDUCERS.2011.5969738

Temporal modulation of x-rays using MEMS micromirrors

Deepkishore Mukhopadhyay, Donald Walko, Il Woong Jung, Jin Wang, Gopal Shenoy, Daniel López

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

Investigations into temporal development of far-from-equilibrium processes can tremendously benefit from ultra-fast x-ray pulses with picosecond time resolution and high pulse repetition rates. Current x-ray modulation techniques fall short of providing solutions for generating such ultra-fast x-rays. However, x-ray modulators based on MEMS micromirrors are promising candidates for this challenge. Design, fabrication and characterization of such a micromirror are presented in this paper. Testing of this micromirror in an x-ray beamline demonstrates its feasibility for generating ultra-fast x-rays.

Original language	English (US)
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1562-1565
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969738
State	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: Jun 5 2011 → Jun 9 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	6/5/11 → 6/9/11

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2011.5969738

Cite this

Mukhopadhyay, D., Walko, D., Jung, I. W., Wang, J., Shenoy, G., & López, D. (2011). Temporal modulation of x-rays using MEMS micromirrors. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1562-1565). [5969738] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969738

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title = "Temporal modulation of x-rays using MEMS micromirrors",

abstract = "Investigations into temporal development of far-from-equilibrium processes can tremendously benefit from ultra-fast x-ray pulses with picosecond time resolution and high pulse repetition rates. Current x-ray modulation techniques fall short of providing solutions for generating such ultra-fast x-rays. However, x-ray modulators based on MEMS micromirrors are promising candidates for this challenge. Design, fabrication and characterization of such a micromirror are presented in this paper. Testing of this micromirror in an x-ray beamline demonstrates its feasibility for generating ultra-fast x-rays.",

author = "Deepkishore Mukhopadhyay and Donald Walko and Jung, {Il Woong} and Jin Wang and Gopal Shenoy and Daniel L{\'o}pez",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

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doi = "10.1109/TRANSDUCERS.2011.5969738",

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Mukhopadhyay, D, Walko, D, Jung, IW, Wang, J, Shenoy, G & López, D 2011, Temporal modulation of x-rays using MEMS micromirrors. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969738, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1562-1565, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969738

Temporal modulation of x-rays using MEMS micromirrors. / Mukhopadhyay, Deepkishore; Walko, Donald; Jung, Il Woong et al.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1562-1565 5969738 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - Investigations into temporal development of far-from-equilibrium processes can tremendously benefit from ultra-fast x-ray pulses with picosecond time resolution and high pulse repetition rates. Current x-ray modulation techniques fall short of providing solutions for generating such ultra-fast x-rays. However, x-ray modulators based on MEMS micromirrors are promising candidates for this challenge. Design, fabrication and characterization of such a micromirror are presented in this paper. Testing of this micromirror in an x-ray beamline demonstrates its feasibility for generating ultra-fast x-rays.

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Mukhopadhyay D, Walko D, Jung IW, Wang J, Shenoy G, López D. Temporal modulation of x-rays using MEMS micromirrors. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1562-1565. 5969738. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969738

Temporal modulation of x-rays using MEMS micromirrors

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