TF012 - High temperature sputtering of barium strontium titanate on nickel foils

Seymen M. Aygün, Patrick Daniels, William Borland, Jon-Paul Maria

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The effects of sputtering temperature on the dielectric properties and the microstructure of barium strontium titanate thin films have been investigated. (Ba0.6Sr0.4)TiO3 films were deposited on Ni foils by radio frequency magnetron sputtering at temperatures between 100-450 °C. Pt top electrodes were sputtered and the metal-insulator-metal configuration was obtained. The capacitors were subsequently co-fired at 900 °C for crystallization and densification in a reducing atmosphere to avoid oxidation of Ni. The permittivity and the tunability of the films were observed to increase with the sputtering temperature, reaching a maximum at 400 0C with a permittivity of 1800 and a tunability ratio of 10:1 at an applied electric field of 45 V/μm. Loss tangents were less than 1.5% at 10 kHz. The formation of NiO was observed in samples sputtered at temperatures above 450 °C and resulted in degraded dielectric properties. Atomic force microscopy images revealed increasing grain size with the increasing sputtering temperature. This microstructural trend accounts for the increasing permittivity values and sharper ferroelectric anomalies found in films processed with increasing sputter temperature.

Original languageEnglish (US)
Title of host publication17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
Volume2
DOIs
StatePublished - Dec 1 2008
Event17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Fe, NM, United States
Duration: Feb 23 2008Feb 28 2008

Other

Other17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
CountryUnited States
CitySanta Fe, NM
Period2/23/082/28/08

Fingerprint

Barium strontium titanate
Nickel
Metal foil
Sputtering
Permittivity
Dielectric properties
Temperature
Metals
Crystallization
Densification
Magnetron sputtering
Ferroelectric materials
Atomic force microscopy
Capacitors
Electric fields
Thin films
Oxidation
Microstructure
Electrodes

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Aygün, S. M., Daniels, P., Borland, W., & Maria, J-P. (2008). TF012 - High temperature sputtering of barium strontium titanate on nickel foils. In 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 (Vol. 2). [4693852] https://doi.org/10.1109/ISAF.2008.4693852
Aygün, Seymen M. ; Daniels, Patrick ; Borland, William ; Maria, Jon-Paul. / TF012 - High temperature sputtering of barium strontium titanate on nickel foils. 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008. Vol. 2 2008.
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Aygün, SM, Daniels, P, Borland, W & Maria, J-P 2008, TF012 - High temperature sputtering of barium strontium titanate on nickel foils. in 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008. vol. 2, 4693852, 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008, Santa Fe, NM, United States, 2/23/08. https://doi.org/10.1109/ISAF.2008.4693852

TF012 - High temperature sputtering of barium strontium titanate on nickel foils. / Aygün, Seymen M.; Daniels, Patrick; Borland, William; Maria, Jon-Paul.

17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008. Vol. 2 2008. 4693852.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Aygün SM, Daniels P, Borland W, Maria J-P. TF012 - High temperature sputtering of barium strontium titanate on nickel foils. In 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008. Vol. 2. 2008. 4693852 https://doi.org/10.1109/ISAF.2008.4693852