The development of metal oxide chemical sensing nanostructures

G. W. Hunter, R. L. Vander Wal, J. C. Xu, L. J. Evans, G. M. Berger, M. J. Kulis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

This paper discusses sensor development based on metal oxide nanostructures and microsystems technology. While nanostructures such as nanowires show significant potential as enabling materials for chemical sensors, a number of significant technical challenges remain. This paper discusses development to address each of these technical barriers: 1) Improved contact and integration of the nanostructured materials with microsystems in a sensor structure; 2) Control of nanostructure crystallinity to allow control of the detection mechanism; and 3) Widening the range of gases that can be detected by fabricating multiple nanostructured materials. A sensor structure composed of three nanostructured oxides aligned on a single microsensor has been fabricated and tested. Results of this testing are discussed and future development approaches are suggested. It is concluded that while this work lays the foundation for further development, these are the beginning steps towards realization of repeatable, controlled sensor systems using oxide based nanostructures.

Original languageEnglish (US)
Title of host publicationECS Transactions - Microfabricated and Nanofabricated Systems for MEMS/NEMS 8
Pages73-84
Number of pages12
Edition14
DOIs
StatePublished - Dec 1 2008
EventMicrofabricated and Nanofabricated Systems for MEMS/NEMS 8 PRiMe 2008 Meeting of the Electrochemical Society - Honolulu, HI, United States
Duration: Oct 12 2008Oct 17 2008

Publication series

NameECS Transactions
Number14
Volume16
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherMicrofabricated and Nanofabricated Systems for MEMS/NEMS 8 PRiMe 2008 Meeting of the Electrochemical Society
CountryUnited States
CityHonolulu, HI
Period10/12/0810/17/08

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Hunter, G. W., Vander Wal, R. L., Xu, J. C., Evans, L. J., Berger, G. M., & Kulis, M. J. (2008). The development of metal oxide chemical sensing nanostructures. In ECS Transactions - Microfabricated and Nanofabricated Systems for MEMS/NEMS 8 (14 ed., pp. 73-84). (ECS Transactions; Vol. 16, No. 14). https://doi.org/10.1149/1.2992230