The effect of deposition conditions on the radiation tolerance of BPSG films

Robert Fuller, Howard Evans, Carol Gamlen, Bill Czagas, Michael Morrison, David Decrosta, Robert Lowry, Patrick M. Lenahan, Christopher Frye

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

A study has been conducted of the effects of deposition conditions on the radiation hardness of borophosphosilicate glass (BPSG). Films deposited by two common deposition techniques were evaluated using gamma cell testing, electron spin resonance (ESR), and capacitance voltage (CV) measurements. The results indicate that two stoichiometrically similar films can differ greatly in radiation tolerance depending on the deposition conditions.

Original languageEnglish (US)
Pages (from-to)2565-2571
Number of pages7
JournalIEEE Transactions on Nuclear Science
Volume43
Issue number6 PART 1
StatePublished - Dec 1 1996

Fingerprint

radiation tolerance
Radiation
Glass
glass
Capacitance measurement
Voltage measurement
electrical measurement
Paramagnetic resonance
electron paramagnetic resonance
hardness
capacitance
Hardness
Testing
radiation
cells

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Nuclear Energy and Engineering
  • Electrical and Electronic Engineering

Cite this

Fuller, R., Evans, H., Gamlen, C., Czagas, B., Morrison, M., Decrosta, D., ... Frye, C. (1996). The effect of deposition conditions on the radiation tolerance of BPSG films. IEEE Transactions on Nuclear Science, 43(6 PART 1), 2565-2571.
Fuller, Robert ; Evans, Howard ; Gamlen, Carol ; Czagas, Bill ; Morrison, Michael ; Decrosta, David ; Lowry, Robert ; Lenahan, Patrick M. ; Frye, Christopher. / The effect of deposition conditions on the radiation tolerance of BPSG films. In: IEEE Transactions on Nuclear Science. 1996 ; Vol. 43, No. 6 PART 1. pp. 2565-2571.
@article{f1b5c608cf9b4b46b0b9b768dd7fc4e6,
title = "The effect of deposition conditions on the radiation tolerance of BPSG films",
abstract = "A study has been conducted of the effects of deposition conditions on the radiation hardness of borophosphosilicate glass (BPSG). Films deposited by two common deposition techniques were evaluated using gamma cell testing, electron spin resonance (ESR), and capacitance voltage (CV) measurements. The results indicate that two stoichiometrically similar films can differ greatly in radiation tolerance depending on the deposition conditions.",
author = "Robert Fuller and Howard Evans and Carol Gamlen and Bill Czagas and Michael Morrison and David Decrosta and Robert Lowry and Lenahan, {Patrick M.} and Christopher Frye",
year = "1996",
month = "12",
day = "1",
language = "English (US)",
volume = "43",
pages = "2565--2571",
journal = "IEEE Transactions on Nuclear Science",
issn = "0018-9499",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "6 PART 1",

}

Fuller, R, Evans, H, Gamlen, C, Czagas, B, Morrison, M, Decrosta, D, Lowry, R, Lenahan, PM & Frye, C 1996, 'The effect of deposition conditions on the radiation tolerance of BPSG films', IEEE Transactions on Nuclear Science, vol. 43, no. 6 PART 1, pp. 2565-2571.

The effect of deposition conditions on the radiation tolerance of BPSG films. / Fuller, Robert; Evans, Howard; Gamlen, Carol; Czagas, Bill; Morrison, Michael; Decrosta, David; Lowry, Robert; Lenahan, Patrick M.; Frye, Christopher.

In: IEEE Transactions on Nuclear Science, Vol. 43, No. 6 PART 1, 01.12.1996, p. 2565-2571.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The effect of deposition conditions on the radiation tolerance of BPSG films

AU - Fuller, Robert

AU - Evans, Howard

AU - Gamlen, Carol

AU - Czagas, Bill

AU - Morrison, Michael

AU - Decrosta, David

AU - Lowry, Robert

AU - Lenahan, Patrick M.

AU - Frye, Christopher

PY - 1996/12/1

Y1 - 1996/12/1

N2 - A study has been conducted of the effects of deposition conditions on the radiation hardness of borophosphosilicate glass (BPSG). Films deposited by two common deposition techniques were evaluated using gamma cell testing, electron spin resonance (ESR), and capacitance voltage (CV) measurements. The results indicate that two stoichiometrically similar films can differ greatly in radiation tolerance depending on the deposition conditions.

AB - A study has been conducted of the effects of deposition conditions on the radiation hardness of borophosphosilicate glass (BPSG). Films deposited by two common deposition techniques were evaluated using gamma cell testing, electron spin resonance (ESR), and capacitance voltage (CV) measurements. The results indicate that two stoichiometrically similar films can differ greatly in radiation tolerance depending on the deposition conditions.

UR - http://www.scopus.com/inward/record.url?scp=0030370708&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030370708&partnerID=8YFLogxK

M3 - Article

VL - 43

SP - 2565

EP - 2571

JO - IEEE Transactions on Nuclear Science

JF - IEEE Transactions on Nuclear Science

SN - 0018-9499

IS - 6 PART 1

ER -

Fuller R, Evans H, Gamlen C, Czagas B, Morrison M, Decrosta D et al. The effect of deposition conditions on the radiation tolerance of BPSG films. IEEE Transactions on Nuclear Science. 1996 Dec 1;43(6 PART 1):2565-2571.