The effect of deposition conditions on the radiation tolerance of BPSG films

Robert Fuller, Howard Evans, Carol Gamlen, Bill Czagas, Michael Morrison, David Decrosta, Robert Lowry, Patrick Lenahan, Christopher Frye

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

A study has been conducted of the effects of deposition conditions on the radiation hardness of borophosphosilicate glass (BPSG). Films deposited by two common deposition techniques were evaluated using gamma cell testing, electron spin resonance (ESR), and capacitance voltage (CV) measurements. The results indicate that two stoichiometrically similar films can differ greatly in radiation tolerance depending on the deposition conditions.

Original languageEnglish (US)
Pages (from-to)2565-2571
Number of pages7
JournalIEEE Transactions on Nuclear Science
Volume43
Issue number6 PART 1
DOIs
StatePublished - 1996

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Nuclear Energy and Engineering
  • Electrical and Electronic Engineering

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