The Effect of Surface Treatments and Growth Conditions on Electrical Characteristics of Thick (>50 nm) Gate Oxides

C. T. Wu, R. Ridley, P. Roman, G. Dolny, T. Grebs, J. Hao, Jerzy Ruzyllo

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

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Chemical Compounds

Engineering & Materials Science