The influence of energetic bombardment on the structure and properties of epitaxial SrRuO3 thin films grown by pulsed laser deposition

Jon-Paul Maria, Susan E. Trolier-McKinstry, D. G. Schlom, M. E. Hawley, G. W. Brown

Research output: Contribution to journalArticle

55 Citations (Scopus)

Abstract

SrRuO3 epitaxial thin films were prepared by pulsed laser deposition (PLD) under a range of growth conditions to study the impact of bombardment on properties. Growth conditions favoring energetic bombardment resulted in SrRuO3 films with expanded in-plane and out-of-plane lattice constants. In particular, SrRuO3 films with pseudocubic out-of-plane lattice constants as large as 4.08 Å were deposited (3.8% larger than the bulk value). Those films with expanded lattices had greater resistivities and depressed Curie transition temperatures. The relative lattice mismatch between film and substrate was found to temper the effect of bombardment such that as the mismatch increased, a higher degree of bombardment was required to produce extended lattice parameters. The pressure-dependent energetic species inherent to PLD and their interaction with the ambient are believed to be the source of the bombarding flux. Further experiments confirmed that in the range of 20-200 mTorr, oxygen/ozone partial pressure had a negligible effect on the film properties.

Original languageEnglish (US)
Pages (from-to)4373-4379
Number of pages7
JournalJournal of Applied Physics
Volume83
Issue number8
DOIs
StatePublished - Apr 15 1998

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pulsed laser deposition
bombardment
thin films
ozone
partial pressure
Curie temperature
lattice parameters
transition temperature
electrical resistivity
oxygen
interactions

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

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abstract = "SrRuO3 epitaxial thin films were prepared by pulsed laser deposition (PLD) under a range of growth conditions to study the impact of bombardment on properties. Growth conditions favoring energetic bombardment resulted in SrRuO3 films with expanded in-plane and out-of-plane lattice constants. In particular, SrRuO3 films with pseudocubic out-of-plane lattice constants as large as 4.08 {\AA} were deposited (3.8{\%} larger than the bulk value). Those films with expanded lattices had greater resistivities and depressed Curie transition temperatures. The relative lattice mismatch between film and substrate was found to temper the effect of bombardment such that as the mismatch increased, a higher degree of bombardment was required to produce extended lattice parameters. The pressure-dependent energetic species inherent to PLD and their interaction with the ambient are believed to be the source of the bombarding flux. Further experiments confirmed that in the range of 20-200 mTorr, oxygen/ozone partial pressure had a negligible effect on the film properties.",
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The influence of energetic bombardment on the structure and properties of epitaxial SrRuO3 thin films grown by pulsed laser deposition. / Maria, Jon-Paul; Trolier-McKinstry, Susan E.; Schlom, D. G.; Hawley, M. E.; Brown, G. W.

In: Journal of Applied Physics, Vol. 83, No. 8, 15.04.1998, p. 4373-4379.

Research output: Contribution to journalArticle

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