Abstract
SrRuO3 epitaxial thin films were prepared by pulsed laser deposition (PLD) under a range of growth conditions to study the impact of bombardment on properties. Growth conditions favoring energetic bombardment resulted in SrRuO3 films with expanded in-plane and out-of-plane lattice constants. In particular, SrRuO3 films with pseudocubic out-of-plane lattice constants as large as 4.08 Å were deposited (3.8% larger than the bulk value). Those films with expanded lattices had greater resistivities and depressed Curie transition temperatures. The relative lattice mismatch between film and substrate was found to temper the effect of bombardment such that as the mismatch increased, a higher degree of bombardment was required to produce extended lattice parameters. The pressure-dependent energetic species inherent to PLD and their interaction with the ambient are believed to be the source of the bombarding flux. Further experiments confirmed that in the range of 20-200 mTorr, oxygen/ozone partial pressure had a negligible effect on the film properties.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 4373-4379 |
| Number of pages | 7 |
| Journal | Journal of Applied Physics |
| Volume | 83 |
| Issue number | 8 |
| DOIs | |
| State | Published - Apr 15 1998 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
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The influence of energetic bombardment on the structure and properties of epitaxial SrRuO3 thin films grown by pulsed laser deposition. / Maria, Jon-Paul; Trolier-McKinstry, Susan E.; Schlom, D. G.; Hawley, M. E.; Brown, G. W.
In: Journal of Applied Physics, Vol. 83, No. 8, 15.04.1998, p. 4373-4379.Research output: Contribution to journal › Article
TY - JOUR
T1 - The influence of energetic bombardment on the structure and properties of epitaxial SrRuO3 thin films grown by pulsed laser deposition
AU - Maria, Jon-Paul
AU - Trolier-McKinstry, Susan E.
AU - Schlom, D. G.
AU - Hawley, M. E.
AU - Brown, G. W.
PY - 1998/4/15
Y1 - 1998/4/15
N2 - SrRuO3 epitaxial thin films were prepared by pulsed laser deposition (PLD) under a range of growth conditions to study the impact of bombardment on properties. Growth conditions favoring energetic bombardment resulted in SrRuO3 films with expanded in-plane and out-of-plane lattice constants. In particular, SrRuO3 films with pseudocubic out-of-plane lattice constants as large as 4.08 Å were deposited (3.8% larger than the bulk value). Those films with expanded lattices had greater resistivities and depressed Curie transition temperatures. The relative lattice mismatch between film and substrate was found to temper the effect of bombardment such that as the mismatch increased, a higher degree of bombardment was required to produce extended lattice parameters. The pressure-dependent energetic species inherent to PLD and their interaction with the ambient are believed to be the source of the bombarding flux. Further experiments confirmed that in the range of 20-200 mTorr, oxygen/ozone partial pressure had a negligible effect on the film properties.
AB - SrRuO3 epitaxial thin films were prepared by pulsed laser deposition (PLD) under a range of growth conditions to study the impact of bombardment on properties. Growth conditions favoring energetic bombardment resulted in SrRuO3 films with expanded in-plane and out-of-plane lattice constants. In particular, SrRuO3 films with pseudocubic out-of-plane lattice constants as large as 4.08 Å were deposited (3.8% larger than the bulk value). Those films with expanded lattices had greater resistivities and depressed Curie transition temperatures. The relative lattice mismatch between film and substrate was found to temper the effect of bombardment such that as the mismatch increased, a higher degree of bombardment was required to produce extended lattice parameters. The pressure-dependent energetic species inherent to PLD and their interaction with the ambient are believed to be the source of the bombarding flux. Further experiments confirmed that in the range of 20-200 mTorr, oxygen/ozone partial pressure had a negligible effect on the film properties.
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U2 - 10.1063/1.367195
DO - 10.1063/1.367195
M3 - Article
VL - 83
SP - 4373
EP - 4379
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 8
ER -