The pore structure and its impacts on property and performance of a spin-on porous low K dielectric

Youfan Liu, Wen Li Wu, Brendan Foran, David Gidley, Hae Jeong Lee, Barry J. Bauer, Bryan Vogt

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

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Chemical Compounds

Engineering & Materials Science