The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

Eric Russell Marsh, Jeremiah A. Couey, R. Ryan Vallance, Allen Y. Yi

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    Monitoring forces when grinding crystalline materials is advantageous for optimising process conditions, improving process control and producing high quality parts. Yet, this is challenging in precision applications where aerostatic spindles and small depths of cut are common. This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact and process monitoring. The system appears promise for monitoring precision wafer.

    Original languageEnglish (US)
    Pages (from-to)270-283
    Number of pages14
    JournalInternational Journal of Manufacturing Technology and Management
    Volume12
    Issue number1-3
    StatePublished - 2007

    Fingerprint

    Monocrystalline silicon
    Monitoring
    Wheel dressing
    Process monitoring
    Process control
    Diamonds
    Crystalline materials
    Grinding
    Experiments

    All Science Journal Classification (ASJC) codes

    • Business, Management and Accounting(all)

    Cite this

    @article{b6f4aa97db7a43609d743458d0d92e5d,
    title = "The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon",
    abstract = "Monitoring forces when grinding crystalline materials is advantageous for optimising process conditions, improving process control and producing high quality parts. Yet, this is challenging in precision applications where aerostatic spindles and small depths of cut are common. This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact and process monitoring. The system appears promise for monitoring precision wafer.",
    author = "Marsh, {Eric Russell} and Couey, {Jeremiah A.} and Vallance, {R. Ryan} and Yi, {Allen Y.}",
    year = "2007",
    language = "English (US)",
    volume = "12",
    pages = "270--283",
    journal = "International Journal of Manufacturing Technology and Management",
    issn = "1368-2148",
    publisher = "Inderscience Enterprises Ltd",
    number = "1-3",

    }

    TY - JOUR

    T1 - The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

    AU - Marsh, Eric Russell

    AU - Couey, Jeremiah A.

    AU - Vallance, R. Ryan

    AU - Yi, Allen Y.

    PY - 2007

    Y1 - 2007

    N2 - Monitoring forces when grinding crystalline materials is advantageous for optimising process conditions, improving process control and producing high quality parts. Yet, this is challenging in precision applications where aerostatic spindles and small depths of cut are common. This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact and process monitoring. The system appears promise for monitoring precision wafer.

    AB - Monitoring forces when grinding crystalline materials is advantageous for optimising process conditions, improving process control and producing high quality parts. Yet, this is challenging in precision applications where aerostatic spindles and small depths of cut are common. This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact and process monitoring. The system appears promise for monitoring precision wafer.

    UR - http://www.scopus.com/inward/record.url?scp=34547311904&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=34547311904&partnerID=8YFLogxK

    M3 - Article

    AN - SCOPUS:34547311904

    VL - 12

    SP - 270

    EP - 283

    JO - International Journal of Manufacturing Technology and Management

    JF - International Journal of Manufacturing Technology and Management

    SN - 1368-2148

    IS - 1-3

    ER -