The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

Eric Russell Marsh, R. Ryan Vallance

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.

    Original languageEnglish (US)
    Title of host publicationProceedings of the 21st Annual ASPE Meeting, ASPE 2006
    StatePublished - 2006
    Event21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 - Monterey, CA, United States
    Duration: Oct 15 2006Oct 20 2006

    Other

    Other21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006
    CountryUnited States
    CityMonterey, CA
    Period10/15/0610/20/06

    Fingerprint

    Monocrystalline silicon
    Wheel dressing
    Monitoring
    Process monitoring
    Diamonds
    Bandwidth
    Experiments

    All Science Journal Classification (ASJC) codes

    • Mechanical Engineering

    Cite this

    @inproceedings{a4ff44453c5443d49554a28cedd8be69,
    title = "The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon",
    abstract = "This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.",
    author = "Marsh, {Eric Russell} and Vallance, {R. Ryan}",
    year = "2006",
    language = "English (US)",
    isbn = "1887706410",
    booktitle = "Proceedings of the 21st Annual ASPE Meeting, ASPE 2006",

    }

    Marsh, ER & Vallance, RR 2006, The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. in Proceedings of the 21st Annual ASPE Meeting, ASPE 2006. 21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006, Monterey, CA, United States, 10/15/06.

    The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. / Marsh, Eric Russell; Vallance, R. Ryan.

    Proceedings of the 21st Annual ASPE Meeting, ASPE 2006. 2006.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    TY - GEN

    T1 - The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

    AU - Marsh, Eric Russell

    AU - Vallance, R. Ryan

    PY - 2006

    Y1 - 2006

    N2 - This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.

    AB - This work presents a system of measuring grinding forces in precision applications. Several experiments demonstrate the performance in monitoring diamond wheel dressing, detecting workpiece contact, and process monitoring. The system appears promising for monitoring precision wafer grinding since this approach provides excellent sensitivity, high signal resolution, and good bandwidth.

    UR - http://www.scopus.com/inward/record.url?scp=84884794393&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=84884794393&partnerID=8YFLogxK

    M3 - Conference contribution

    AN - SCOPUS:84884794393

    SN - 1887706410

    SN - 9781887706414

    BT - Proceedings of the 21st Annual ASPE Meeting, ASPE 2006

    ER -