The testing method of mechanical properties of thin films

Long-qing Chen, Minghao Zhao, Tong Yi Zhang

Research output: Contribution to journalArticle

18 Scopus citations

Abstract

The present work summarizes the novel experimental methods recently developed to characterize the mechanical properties of thin films. These methods include the nanoindentation test, the indentation fracture technique, the micro-rotating-structure indicator, the bending test of microcantilever beams, the microbridge test, and the bulge test. The features and merits of these experimental methods are described in detail. The mechanical properties of thin films, such as residual stresses, Young's modulus, fracture strength, hardness, and etc, characterized by these methods are also briefly introduced.

Original languageEnglish (US)
Pages (from-to)413-429
Number of pages17
JournalJixie Qiangdu/Journal of Mechanical Strength
Volume23
Issue number4
StatePublished - Dec 1 2001

All Science Journal Classification (ASJC) codes

  • Modeling and Simulation
  • Mechanics of Materials
  • Mechanical Engineering
  • Applied Mathematics

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