Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch

Abdallah H. Ramini, Qais M. Hennawi, Mohammad I. Younis

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

We present theoretical and experimental investigation of the nonlinear behavior of a clamped-clamped in-plane microelectromechanical systems (MEMS) arch when excited by a dc electrostatic load superimposed to an ac harmonic load. Experimentally, a case study of in-plane silicon micromachined arch is examined and its mechanical behavior is measured using the optical techniques. An algorithm is developed to extract the various parameters, such as the induced axial force and the initial rise, needed to model the behavior of the arch. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. In addition, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Dynamic snap-through behavior is also reported for the larger range of electric loads. Theoretically, a multi-mode Galerkin reduced order model is utilized to simulate the arch behavior. General agreement is reported among the theoretical and experimental data. [2015-0213]

Original languageEnglish (US)
Article number7463473
Pages (from-to)570-578
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume25
Issue number3
DOIs
StatePublished - Jun 2016

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Arches
MEMS
Electric loads
Electrostatic force
Stretching
Hardening
Electrostatics
Silicon
Geometry

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{13208d6c471e45feb32dc5e5092b380c,
title = "Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch",
abstract = "We present theoretical and experimental investigation of the nonlinear behavior of a clamped-clamped in-plane microelectromechanical systems (MEMS) arch when excited by a dc electrostatic load superimposed to an ac harmonic load. Experimentally, a case study of in-plane silicon micromachined arch is examined and its mechanical behavior is measured using the optical techniques. An algorithm is developed to extract the various parameters, such as the induced axial force and the initial rise, needed to model the behavior of the arch. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. In addition, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Dynamic snap-through behavior is also reported for the larger range of electric loads. Theoretically, a multi-mode Galerkin reduced order model is utilized to simulate the arch behavior. General agreement is reported among the theoretical and experimental data. [2015-0213]",
author = "Ramini, {Abdallah H.} and Hennawi, {Qais M.} and Younis, {Mohammad I.}",
year = "2016",
month = "6",
doi = "10.1109/JMEMS.2016.2554659",
language = "English (US)",
volume = "25",
pages = "570--578",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3",

}

Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch. / Ramini, Abdallah H.; Hennawi, Qais M.; Younis, Mohammad I.

In: Journal of Microelectromechanical Systems, Vol. 25, No. 3, 7463473, 06.2016, p. 570-578.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Theoretical and Experimental Investigation of the Nonlinear Behavior of an Electrostatically Actuated In-Plane MEMS Arch

AU - Ramini, Abdallah H.

AU - Hennawi, Qais M.

AU - Younis, Mohammad I.

PY - 2016/6

Y1 - 2016/6

N2 - We present theoretical and experimental investigation of the nonlinear behavior of a clamped-clamped in-plane microelectromechanical systems (MEMS) arch when excited by a dc electrostatic load superimposed to an ac harmonic load. Experimentally, a case study of in-plane silicon micromachined arch is examined and its mechanical behavior is measured using the optical techniques. An algorithm is developed to extract the various parameters, such as the induced axial force and the initial rise, needed to model the behavior of the arch. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. In addition, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Dynamic snap-through behavior is also reported for the larger range of electric loads. Theoretically, a multi-mode Galerkin reduced order model is utilized to simulate the arch behavior. General agreement is reported among the theoretical and experimental data. [2015-0213]

AB - We present theoretical and experimental investigation of the nonlinear behavior of a clamped-clamped in-plane microelectromechanical systems (MEMS) arch when excited by a dc electrostatic load superimposed to an ac harmonic load. Experimentally, a case study of in-plane silicon micromachined arch is examined and its mechanical behavior is measured using the optical techniques. An algorithm is developed to extract the various parameters, such as the induced axial force and the initial rise, needed to model the behavior of the arch. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. In addition, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Dynamic snap-through behavior is also reported for the larger range of electric loads. Theoretically, a multi-mode Galerkin reduced order model is utilized to simulate the arch behavior. General agreement is reported among the theoretical and experimental data. [2015-0213]

UR - http://www.scopus.com/inward/record.url?scp=84966348859&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84966348859&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2016.2554659

DO - 10.1109/JMEMS.2016.2554659

M3 - Article

AN - SCOPUS:84966348859

VL - 25

SP - 570

EP - 578

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 3

M1 - 7463473

ER -