Theoretical prediction of experimental jump and pull-in dynamics in a MEMS sensor

Laura Ruzziconi, Stefano Lenci, Abdallah H. Ramini, Mohammad I. Younis

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical single degree-of-freedom spring-mass model is derived. Classical numerical simulations are observed to properly predict the main nonlinear features. Nevertheless, some discrepancies arise, which are particularly visible in the resonant branch. They mainly concern the practical range of existence of each attractor and the final outcome after its disappearance. These differences are likely due to disturbances, which are unavoidable in practice, but have not been included in the model. To take disturbances into account, in addition to the classical local investigations, we consider the global dynamics and explore the robustness of the obtained results by performing a dynamical integrity analysis. Our aim is that of developing an applicable confident estimate of the system response. Integrity profiles and integrity charts are built to detect the parameter range where reliability is practically strong and where it becomes weak. Integrity curves exactly follow the experimental data. They inform about the practical range of actuality. We discuss the combined use of integrity charts in the engineering design. Although we refer to a particular case-study, the approach is very general.

Original languageEnglish (US)
Pages (from-to)17089-17111
Number of pages23
JournalSensors (Switzerland)
Volume14
Issue number9
DOIs
StatePublished - Sep 15 2014

Fingerprint

Micro-Electrical-Mechanical Systems
integrity
microelectromechanical systems
MEMS
Equipment and Supplies
sensors
Sensors
Degrees of freedom (mechanics)
predictions
Research
charts
Natural frequencies
disturbances
Computer simulation
sweep frequency
resonant frequencies
degrees of freedom
engineering
curves
estimates

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Ruzziconi, Laura ; Lenci, Stefano ; Ramini, Abdallah H. ; Younis, Mohammad I. / Theoretical prediction of experimental jump and pull-in dynamics in a MEMS sensor. In: Sensors (Switzerland). 2014 ; Vol. 14, No. 9. pp. 17089-17111.
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Theoretical prediction of experimental jump and pull-in dynamics in a MEMS sensor. / Ruzziconi, Laura; Lenci, Stefano; Ramini, Abdallah H.; Younis, Mohammad I.

In: Sensors (Switzerland), Vol. 14, No. 9, 15.09.2014, p. 17089-17111.

Research output: Contribution to journalArticle

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