Theoretical studies of ion bombardment: Many-body interactions

Davy Y. Lo, Tom A. Tombrello, Mark H. Shapiro, Barbara J. Garrison, Nicholas Winograd, Don E. Harrison

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

Many-body forces obtained by the embedded-atom method are incorporated into the description of low-energy collisions and surface ejection processes in molecular dynamics simulations of sputtering from metal targets. Bombardment of small, single-crystal Cu targets (400–500 atoms) in three different orientations ({100}, {110}, {ill}) by 5-keV Ar+ ions have been simulated. The results are compared to simulations using purely pairwise additive interactions. Significant differences in the spectra of ejected atoms are found.

Original languageEnglish (US)
Pages (from-to)708-711
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume6
Issue number3
DOIs
StatePublished - May 1988

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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