Thermal characterization of liquids and polymer thin films using a microcalorimeter

Yuyan Zhang, Srinivas Tadigadapa

Research output: Contribution to journalArticlepeer-review

36 Scopus citations

Abstract

This paper presents an integrated microfluidic thermal sensor that can be used to characterize the thermal properties of nanoliter quantities of fluids and polymer thin films. The device consists of a polycrystalline silicon (polysilicon) heater located in close proximity to the hot junctions of p+ -polysilicon/gold microthermopiles fabricated on a thermally isolated membrane. ac calorimetric measurements were performed by introducing a periodic heat signal using the heater and detecting the frequency-dependent thermal signal response in the presence of various fluids and polymers. The thermal conductivity of different fluids and five typical polymers used in microfabrication was measured using this device.

Original languageEnglish (US)
Article number034101
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume86
Issue number3
DOIs
StatePublished - Jan 17 2005

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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