Thickness dependence of the electrical properties of sol-gel derived lead zirconate titanate thin films with (111) and (100) texture

F. Chu, F. Xu, J. Shepard, S. Trolier-McKinstry

Research output: Contribution to journalConference articlepeer-review

13 Scopus citations

Abstract

Crack-free (111) and (100)-textured Pb(Zr0.52Ti0.48)O3 films with thicknesses ranging from 0.25 to 2.5 μm were prepared using a methoxyethanol-based precursor solution, multiple spin-coating and multiple crystallization steps. The thickness dependence of the dielectric, ferroelectric and piezoelectric properties were investigated on both (111) and (100) oriented PZT films. In both cases, the degree of preferred orientation did not change with thickness. It is found that the dielectric constant, remanent polarization and piezoelectric coefficients (d33 and d31) increase with increasing film thickness. The (100)-textured film showed higher dielectric constant but lower remanent polarization relative to (111) textured film. 1 μm was identified to be a critical thickness that marks the change of dielectric, ferroelectric and piezoelectric behaviors as a function of thickness.

Original languageEnglish (US)
Pages (from-to)409-414
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume493
StatePublished - Jan 1 1998
EventProceedings of the 1997 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 30 1997Dec 4 1997

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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