Thin film anodized titania nanotubes-based oxygen sensor

Alison E. Viegas, Debaditya Chatterjee, Tanushree H. Choudhury, Srinivasan Raghavan, Navakanta Bhat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Anodized titania, synthesized on oxidized silicon substrate, has been used as oxygen gas sensor. The as-anodized films resulted in a sensitivity of 5756% at 125°C, when exposed to 100% oxygen. The gas-sensing performance of anodized films has been evaluated with post-anodization treatment in de-ionized water and aqueous ammonia solution. The sensitivity increases to 8646% and 16599%, with post-treatment in aqueous ammonia solution and de-ionized water, respectively. This is attributed to increase surface area and activation during the post- anodization treatment. The repeatability of sensor performance has also been evaluated, and it is observed that the de-ionized water treated film is unstable for repeated sensing, possibly due to some structural modifications.

Original languageEnglish (US)
Title of host publication2014 IEEE 2nd International Conference on Emerging Electronics
Subtitle of host publicationMaterials to Devices, ICEE 2014 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781467365277
DOIs
StatePublished - Jan 1 2014
Event2014 2nd IEEE International Conference on Emerging Electronics, ICEE 2014 - Bengaluru, India
Duration: Dec 3 2014Dec 6 2014

Publication series

Name2014 IEEE 2nd International Conference on Emerging Electronics: Materials to Devices, ICEE 2014 - Conference Proceedings

Other

Other2014 2nd IEEE International Conference on Emerging Electronics, ICEE 2014
CountryIndia
CityBengaluru
Period12/3/1412/6/14

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • Cite this

    Viegas, A. E., Chatterjee, D., Choudhury, T. H., Raghavan, S., & Bhat, N. (2014). Thin film anodized titania nanotubes-based oxygen sensor. In 2014 IEEE 2nd International Conference on Emerging Electronics: Materials to Devices, ICEE 2014 - Conference Proceedings [7151130] (2014 IEEE 2nd International Conference on Emerging Electronics: Materials to Devices, ICEE 2014 - Conference Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICEmElec.2014.7151130