Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation

Christopher Y. Cheng, Ajay Dangi, Liqiang Ren, Sudhanshu Tiwari, Robert R. Benoit, Yongqiang Qiu, Holly S. Lay, Sumit Agrawal, Rudra Pratap, Sri Rajasekhar Kothapalli, Thomas E. Mallouk, Sandy Cochran, Susan Trolier-Mckinstry

Research output: Contribution to journalArticle

Abstract

Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 μm, a resonant frequency of 8 MHz, and an operational bandwidth (BW) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 μm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.

Original languageEnglish (US)
Article number8753665
Pages (from-to)1605-1615
Number of pages11
JournalIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume66
Issue number10
DOIs
StatePublished - Oct 2019

Fingerprint

Ultrasonic transducers
Piezoelectric transducers
Diaphragms
manipulators
transducers
diaphragms
ultrasonics
beads
Thin films
thin films
Bandwidth
trapping
bandwidth
Microfluidics
Natural frequencies
levitation
Acoustics
Silica
resonant frequencies
waveforms

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Cite this

Cheng, Christopher Y. ; Dangi, Ajay ; Ren, Liqiang ; Tiwari, Sudhanshu ; Benoit, Robert R. ; Qiu, Yongqiang ; Lay, Holly S. ; Agrawal, Sumit ; Pratap, Rudra ; Kothapalli, Sri Rajasekhar ; Mallouk, Thomas E. ; Cochran, Sandy ; Trolier-Mckinstry, Susan. / Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation. In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2019 ; Vol. 66, No. 10. pp. 1605-1615.
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abstract = "Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 μm, a resonant frequency of 8 MHz, and an operational bandwidth (BW) of 62.5{\%}. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 μm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.",
author = "Cheng, {Christopher Y.} and Ajay Dangi and Liqiang Ren and Sudhanshu Tiwari and Benoit, {Robert R.} and Yongqiang Qiu and Lay, {Holly S.} and Sumit Agrawal and Rudra Pratap and Kothapalli, {Sri Rajasekhar} and Mallouk, {Thomas E.} and Sandy Cochran and Susan Trolier-Mckinstry",
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Cheng, CY, Dangi, A, Ren, L, Tiwari, S, Benoit, RR, Qiu, Y, Lay, HS, Agrawal, S, Pratap, R, Kothapalli, SR, Mallouk, TE, Cochran, S & Trolier-Mckinstry, S 2019, 'Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation', IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol. 66, no. 10, 8753665, pp. 1605-1615. https://doi.org/10.1109/TUFFC.2019.2926211

Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation. / Cheng, Christopher Y.; Dangi, Ajay; Ren, Liqiang; Tiwari, Sudhanshu; Benoit, Robert R.; Qiu, Yongqiang; Lay, Holly S.; Agrawal, Sumit; Pratap, Rudra; Kothapalli, Sri Rajasekhar; Mallouk, Thomas E.; Cochran, Sandy; Trolier-Mckinstry, Susan.

In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control, Vol. 66, No. 10, 8753665, 10.2019, p. 1605-1615.

Research output: Contribution to journalArticle

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T1 - Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation

AU - Cheng, Christopher Y.

AU - Dangi, Ajay

AU - Ren, Liqiang

AU - Tiwari, Sudhanshu

AU - Benoit, Robert R.

AU - Qiu, Yongqiang

AU - Lay, Holly S.

AU - Agrawal, Sumit

AU - Pratap, Rudra

AU - Kothapalli, Sri Rajasekhar

AU - Mallouk, Thomas E.

AU - Cochran, Sandy

AU - Trolier-Mckinstry, Susan

PY - 2019/10

Y1 - 2019/10

N2 - Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 μm, a resonant frequency of 8 MHz, and an operational bandwidth (BW) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 μm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.

AB - Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 μm, a resonant frequency of 8 MHz, and an operational bandwidth (BW) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 μm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.

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