TY - JOUR
T1 - Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation
AU - Cheng, Christopher Y.
AU - Dangi, Ajay
AU - Ren, Liqiang
AU - Tiwari, Sudhanshu
AU - Benoit, Robert R.
AU - Qiu, Yongqiang
AU - Lay, Holly S.
AU - Agrawal, Sumit
AU - Pratap, Rudra
AU - Kothapalli, Sri Rajasekhar
AU - Mallouk, Thomas E.
AU - Cochran, Sandy
AU - Trolier-Mckinstry, Susan
N1 - Funding Information:
Manuscript received March 7, 2019; accepted June 26, 2019. Date of publication July 2, 2019; date of current version September 25, 2019. This work was supported in part by the Center for Nanoscale Science, Materials Research Science and Engineering Center (MRSEC), and funded by the National Science Foundation under Grant DMR-1420620. C. Y. Cheng was supported by the National Defense Science and Engineering Graduate (NDSEG) Fellowship Program. A. Dangi was supported by the National Institute of Biomedical Imaging and Bioengineering (NIBIB), Center of National Institute of Health through the Post-Doctoral Fellowship awarded to Dr. Kothapalli under Grant R00EB017729-04. (Corresponding author: Christopher Y. Cheng.) C. Y. Cheng and S. Trolier-McKinstry are with the Department of Materials Science and Engineering, Pennsylvania State University, University Park, PA 16802 USA, and also with the Materials Research Institute, Pennsylvania State University, University Park, PA 16802 USA (e-mail: cyc5@psu.edu; set1. . u.edu).
PY - 2019/10
Y1 - 2019/10
N2 - Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 μm, a resonant frequency of 8 MHz, and an operational bandwidth (BW) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 μm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.
AB - Lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized, and tested. The PMUTs had a diaphragm diameter of 60 μm, a resonant frequency of 8 MHz, and an operational bandwidth (BW) of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 μm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move toward diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational BW. Levitation planes were generated above the 30 MHz driving frequency.
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U2 - 10.1109/TUFFC.2019.2926211
DO - 10.1109/TUFFC.2019.2926211
M3 - Article
C2 - 31283502
AN - SCOPUS:85072717744
VL - 66
SP - 1605
EP - 1615
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
SN - 0885-3010
IS - 10
M1 - 8753665
ER -