Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography

X. Y. Zhong, B. Kabius, D. K. Schreiber, J. A. Eastman, D. D. Fong, A. K. Petford-Long

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9 Scopus citations


The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO 2/In 2O 3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO 2/In 2O 3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO 2/In 2O 3 heterostructure that has potential to exhibit mixed conduction behavior.

Original languageEnglish (US)
Article number101604
JournalApplied Physics Letters
Issue number10
StatePublished - Mar 5 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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