Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography

X. Y. Zhong, Bernd C. Kabius, D. K. Schreiber, J. A. Eastman, D. D. Fong, A. K. Petford-Long

Research output: Contribution to journalArticle

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Abstract

The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO 2/In 2O 3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO 2/In 2O 3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO 2/In 2O 3 heterostructure that has potential to exhibit mixed conduction behavior.

Original languageEnglish (US)
Article number101604
JournalApplied Physics Letters
Volume100
Issue number10
DOIs
StatePublished - Mar 5 2012

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roughness
tomography
electron energy
chemistry
deviation
conduction
oxides

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Zhong, X. Y. ; Kabius, Bernd C. ; Schreiber, D. K. ; Eastman, J. A. ; Fong, D. D. ; Petford-Long, A. K. / Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography. In: Applied Physics Letters. 2012 ; Vol. 100, No. 10.
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Three-dimensional quantitative chemical roughness of buried ZrO 2/In 2O 3 interfaces via energy-filtered electron tomography. / Zhong, X. Y.; Kabius, Bernd C.; Schreiber, D. K.; Eastman, J. A.; Fong, D. D.; Petford-Long, A. K.

In: Applied Physics Letters, Vol. 100, No. 10, 101604, 05.03.2012.

Research output: Contribution to journalArticle

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