Titanium dioxide nanowire sensor array integration on CMOS platform using deterministic assembly

Oren Z. Gall, Xiahua Zhong, Daniel S. Schulman, Myungkoo Kang, Ali Razavieh, Theresa S. Mayer

Research output: Contribution to journalArticle

Abstract

Nanosensor arrays have recently received significant attention due to their utility in a wide range of applications, including gas sensing, fuel cells, internet of things, and portable health monitoring systems. Less attention has been given to the production of sensor platforms in the μW range for ultra-low power applications. Here, we discuss how to scale the nanosensor energy demand by developing a process for integration of nanowire sensing arrays on a monolithic CMOS chip. This work demonstrates an off-chip nanowire fabrication method; subsequently nanowires link to a fused SiO2 substrate using electric-field assisted directed assembly. The nanowire resistances shown in this work have the highest resistance uniformity reported to date of 18%, which enables a practical roadmap towards the coupling of nanosensors to CMOS circuits and signal processing systems. The article also presents the utility of optimizing annealing conditions of the off-chip metal-oxides prior to CMOS integration to avoid limitations of thermal budget and process incompatibility. In the context of the platform demonstrated here, directed assembly is a powerful tool that can realize highly uniform, cross-reactive arrays of different types of metal-oxide nanosensors suited for gas discrimination and signal processing systems.

Original languageEnglish (US)
Article number265501
JournalNanotechnology
Volume28
Issue number26
DOIs
StatePublished - Jun 6 2017

Fingerprint

Nanosensors
Sensor arrays
Titanium dioxide
Nanowires
Oxides
Signal processing
Gases
Metals
Fuel cells
Electric fields
Health
Annealing
Fabrication
titanium dioxide
Networks (circuits)
Monitoring
Sensors
Substrates

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Gall, Oren Z. ; Zhong, Xiahua ; Schulman, Daniel S. ; Kang, Myungkoo ; Razavieh, Ali ; Mayer, Theresa S. / Titanium dioxide nanowire sensor array integration on CMOS platform using deterministic assembly. In: Nanotechnology. 2017 ; Vol. 28, No. 26.
@article{9733ca4408a8489b931b9256a9c1355f,
title = "Titanium dioxide nanowire sensor array integration on CMOS platform using deterministic assembly",
abstract = "Nanosensor arrays have recently received significant attention due to their utility in a wide range of applications, including gas sensing, fuel cells, internet of things, and portable health monitoring systems. Less attention has been given to the production of sensor platforms in the μW range for ultra-low power applications. Here, we discuss how to scale the nanosensor energy demand by developing a process for integration of nanowire sensing arrays on a monolithic CMOS chip. This work demonstrates an off-chip nanowire fabrication method; subsequently nanowires link to a fused SiO2 substrate using electric-field assisted directed assembly. The nanowire resistances shown in this work have the highest resistance uniformity reported to date of 18{\%}, which enables a practical roadmap towards the coupling of nanosensors to CMOS circuits and signal processing systems. The article also presents the utility of optimizing annealing conditions of the off-chip metal-oxides prior to CMOS integration to avoid limitations of thermal budget and process incompatibility. In the context of the platform demonstrated here, directed assembly is a powerful tool that can realize highly uniform, cross-reactive arrays of different types of metal-oxide nanosensors suited for gas discrimination and signal processing systems.",
author = "Gall, {Oren Z.} and Xiahua Zhong and Schulman, {Daniel S.} and Myungkoo Kang and Ali Razavieh and Mayer, {Theresa S.}",
year = "2017",
month = "6",
day = "6",
doi = "10.1088/1361-6528/aa7456",
language = "English (US)",
volume = "28",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "26",

}

Titanium dioxide nanowire sensor array integration on CMOS platform using deterministic assembly. / Gall, Oren Z.; Zhong, Xiahua; Schulman, Daniel S.; Kang, Myungkoo; Razavieh, Ali; Mayer, Theresa S.

In: Nanotechnology, Vol. 28, No. 26, 265501, 06.06.2017.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Titanium dioxide nanowire sensor array integration on CMOS platform using deterministic assembly

AU - Gall, Oren Z.

AU - Zhong, Xiahua

AU - Schulman, Daniel S.

AU - Kang, Myungkoo

AU - Razavieh, Ali

AU - Mayer, Theresa S.

PY - 2017/6/6

Y1 - 2017/6/6

N2 - Nanosensor arrays have recently received significant attention due to their utility in a wide range of applications, including gas sensing, fuel cells, internet of things, and portable health monitoring systems. Less attention has been given to the production of sensor platforms in the μW range for ultra-low power applications. Here, we discuss how to scale the nanosensor energy demand by developing a process for integration of nanowire sensing arrays on a monolithic CMOS chip. This work demonstrates an off-chip nanowire fabrication method; subsequently nanowires link to a fused SiO2 substrate using electric-field assisted directed assembly. The nanowire resistances shown in this work have the highest resistance uniformity reported to date of 18%, which enables a practical roadmap towards the coupling of nanosensors to CMOS circuits and signal processing systems. The article also presents the utility of optimizing annealing conditions of the off-chip metal-oxides prior to CMOS integration to avoid limitations of thermal budget and process incompatibility. In the context of the platform demonstrated here, directed assembly is a powerful tool that can realize highly uniform, cross-reactive arrays of different types of metal-oxide nanosensors suited for gas discrimination and signal processing systems.

AB - Nanosensor arrays have recently received significant attention due to their utility in a wide range of applications, including gas sensing, fuel cells, internet of things, and portable health monitoring systems. Less attention has been given to the production of sensor platforms in the μW range for ultra-low power applications. Here, we discuss how to scale the nanosensor energy demand by developing a process for integration of nanowire sensing arrays on a monolithic CMOS chip. This work demonstrates an off-chip nanowire fabrication method; subsequently nanowires link to a fused SiO2 substrate using electric-field assisted directed assembly. The nanowire resistances shown in this work have the highest resistance uniformity reported to date of 18%, which enables a practical roadmap towards the coupling of nanosensors to CMOS circuits and signal processing systems. The article also presents the utility of optimizing annealing conditions of the off-chip metal-oxides prior to CMOS integration to avoid limitations of thermal budget and process incompatibility. In the context of the platform demonstrated here, directed assembly is a powerful tool that can realize highly uniform, cross-reactive arrays of different types of metal-oxide nanosensors suited for gas discrimination and signal processing systems.

UR - http://www.scopus.com/inward/record.url?scp=85020548196&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85020548196&partnerID=8YFLogxK

U2 - 10.1088/1361-6528/aa7456

DO - 10.1088/1361-6528/aa7456

M3 - Article

C2 - 28525391

AN - SCOPUS:85020548196

VL - 28

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 26

M1 - 265501

ER -