Toward a more quantitative evaluation for nano-scaled thin film system with scanning acoustic microscopy

B. R. Tittmann, C. Miyasaka, C. Ishiyama, I. Kc Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Scanning acoustic microscopy (SAM) was employed to characterize 100 nm thin films of platinum on substrates with two different means of surface preparation. The well-known technique of V(z) was used to estimate the surface acoustic velocity which was found to differ between the two surface preparations. The thin films were also subjected to destructive tests, which also showed differences. The results suggest potential application to characterize adhesion properties of thin films.

Original languageEnglish (US)
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation
Pages793-797
Number of pages5
Edition31
DOIs
StatePublished - Jul 13 2012
Event38th Annual Review of Progress in Quantitative Nondestructive Evaluation, QNDE - Burlington, VT, United States
Duration: Jul 17 2011Jul 22 2011

Publication series

NameAIP Conference Proceedings
Number31
Volume1430
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other38th Annual Review of Progress in Quantitative Nondestructive Evaluation, QNDE
CountryUnited States
CityBurlington, VT
Period7/17/117/22/11

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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