Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

Maximilian Haider, Harald Rose, Stephan Uhlemann, Bernd Kabius, Knut Urban

Research output: Contribution to journalArticlepeer-review

153 Scopus citations

Abstract

A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO2 interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.

Original languageEnglish (US)
Pages (from-to)395-405
Number of pages11
JournalJournal of Electron Microscopy
Volume47
Issue number5
DOIs
StatePublished - 1998

All Science Journal Classification (ASJC) codes

  • Instrumentation

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