Towards the use of the conformal-evaporated-film-by-rotation technique in fabricating microelectronic circuits and microsystems

R. J. Martín-Palma, C. G. Pantano, A. Lakhtakia

Research output: Contribution to journalArticle

11 Scopus citations

Abstract

We used the conformal-evaporated-film-by-rotation technique to deposit a conformal coating of chalcogenide glass on the external surface of a microsystem-specifically, the outermost surface of a microelectromechanical system comb resonator. We concluded that this technique could complement the multi-step, time-consuming and expensive traditional lithographic processes, resulting in a reduction of the number of steps needed for the fabrication of microsystems and nanosystems.

Original languageEnglish (US)
Pages (from-to)460-462
Number of pages3
JournalMicroelectronics Reliability
Volume49
Issue number4
DOIs
StatePublished - Apr 1 2009

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Safety, Risk, Reliability and Quality
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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