TRACE ANALYSIS OF SOLID SURFACES BY COMBINATION OF ENERGETIC ION BOMBARDMENT AND MULTIPHOTON RESONANCE IONIZATION.

F. M. Kimock, J. P. Baxter, P. H. Kobrin, D. L. Pappas, Nicholas Winograd

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Recently, multiphoton resonance ionization (MPRI) has been coupled with energetic ion bombardment to yield a highly efficient and selective tool for solids analysis. Although this method promises to yield sub-ppb analysis for some materials, there are a number of experimental factors which will ultimately limit the analytical sensitivity of the technique. Among these factors are a) duty cycle, b) primary ion current, c) sputter yield, d) fraction of ejected particles which are ionizable, and e) detection efficiency. This paper discusses the origin of these factors and their influence on the use of MPRI for trace analysis of solids.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsRichard A. Keller
PublisherSPIE
Pages24-31
Number of pages8
ISBN (Print)0892524618
StatePublished - Dec 1 1983

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume426
ISSN (Print)0277-786X

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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