Transfer-free batch fabrication of large- Area suspended graphene membranes

Benjamín Alemán, William Regan, Shaul Aloni, Virginia Altoe, Nasim Alem, Caǧlar Girit, Baisong Geng, Lorenzo Maserati, Michael Crommie, Feng Wang, A. Zettl

Research output: Contribution to journalArticle

73 Citations (Scopus)

Abstract

We demonstrate a process for batch production of large-area (100-3000 μrn2) patterned freestanding graphene membranes on Cu scaffolds using chemical vapor deposition (CVD)-grown graphene. This technique avoids the use of silicon and transfers of graphene. As one application of this technique, we fabricate transmission electron microscopy (TEM) sample supports. TEM characterization of the graphene membranes reveals relatively clean, highly TEM-transparent, single-layer graphene regions (∼50% by area) and, despite the polycrystalline nature of CVD graphene, membrane yields as high as 75-100%. This high yield verifies that the intrinsic strength and integrity of CVD-grown graphene films is sufficient for sub-100 μm width membrane applications. Elemental analysis (electron energy loss spectroscopy (EELS) and X-ray energy-dispersive spectroscopy (EDS)) of the graphene membranes reveals some nanoscaled contamination left over from the etching process, and we suggest several ways to reduce this contamination and improve the quality of the graphene for electronic device applications. This large-scale production of suspended graphene membranes facilitates access to the two-dimensional physics of graphene that are suppressed by substrate interactions and enables the widespread use of graphene-based sample supports for electron and optical microscopy.

Original languageEnglish (US)
Pages (from-to)4762-4768
Number of pages7
JournalACS nano
Volume4
Issue number8
DOIs
StatePublished - Aug 24 2010

Fingerprint

Graphite
Graphene
graphene
membranes
Membranes
Fabrication
fabrication
Chemical vapor deposition
vapor deposition
Transmission electron microscopy
transmission electron microscopy
contamination
Contamination
Electron energy loss spectroscopy
Silicon
Scaffolds
integrity
spectroscopy
Electron microscopy
Optical microscopy

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Alemán, B., Regan, W., Aloni, S., Altoe, V., Alem, N., Girit, C., ... Zettl, A. (2010). Transfer-free batch fabrication of large- Area suspended graphene membranes. ACS nano, 4(8), 4762-4768. https://doi.org/10.1021/nn100459u
Alemán, Benjamín ; Regan, William ; Aloni, Shaul ; Altoe, Virginia ; Alem, Nasim ; Girit, Caǧlar ; Geng, Baisong ; Maserati, Lorenzo ; Crommie, Michael ; Wang, Feng ; Zettl, A. / Transfer-free batch fabrication of large- Area suspended graphene membranes. In: ACS nano. 2010 ; Vol. 4, No. 8. pp. 4762-4768.
@article{4850e6e055374e5995c4d2a0e801c18c,
title = "Transfer-free batch fabrication of large- Area suspended graphene membranes",
abstract = "We demonstrate a process for batch production of large-area (100-3000 μrn2) patterned freestanding graphene membranes on Cu scaffolds using chemical vapor deposition (CVD)-grown graphene. This technique avoids the use of silicon and transfers of graphene. As one application of this technique, we fabricate transmission electron microscopy (TEM) sample supports. TEM characterization of the graphene membranes reveals relatively clean, highly TEM-transparent, single-layer graphene regions (∼50{\%} by area) and, despite the polycrystalline nature of CVD graphene, membrane yields as high as 75-100{\%}. This high yield verifies that the intrinsic strength and integrity of CVD-grown graphene films is sufficient for sub-100 μm width membrane applications. Elemental analysis (electron energy loss spectroscopy (EELS) and X-ray energy-dispersive spectroscopy (EDS)) of the graphene membranes reveals some nanoscaled contamination left over from the etching process, and we suggest several ways to reduce this contamination and improve the quality of the graphene for electronic device applications. This large-scale production of suspended graphene membranes facilitates access to the two-dimensional physics of graphene that are suppressed by substrate interactions and enables the widespread use of graphene-based sample supports for electron and optical microscopy.",
author = "Benjam{\'i}n Alem{\'a}n and William Regan and Shaul Aloni and Virginia Altoe and Nasim Alem and Caǧlar Girit and Baisong Geng and Lorenzo Maserati and Michael Crommie and Feng Wang and A. Zettl",
year = "2010",
month = "8",
day = "24",
doi = "10.1021/nn100459u",
language = "English (US)",
volume = "4",
pages = "4762--4768",
journal = "ACS Nano",
issn = "1936-0851",
publisher = "American Chemical Society",
number = "8",

}

Alemán, B, Regan, W, Aloni, S, Altoe, V, Alem, N, Girit, C, Geng, B, Maserati, L, Crommie, M, Wang, F & Zettl, A 2010, 'Transfer-free batch fabrication of large- Area suspended graphene membranes', ACS nano, vol. 4, no. 8, pp. 4762-4768. https://doi.org/10.1021/nn100459u

Transfer-free batch fabrication of large- Area suspended graphene membranes. / Alemán, Benjamín; Regan, William; Aloni, Shaul; Altoe, Virginia; Alem, Nasim; Girit, Caǧlar; Geng, Baisong; Maserati, Lorenzo; Crommie, Michael; Wang, Feng; Zettl, A.

In: ACS nano, Vol. 4, No. 8, 24.08.2010, p. 4762-4768.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Transfer-free batch fabrication of large- Area suspended graphene membranes

AU - Alemán, Benjamín

AU - Regan, William

AU - Aloni, Shaul

AU - Altoe, Virginia

AU - Alem, Nasim

AU - Girit, Caǧlar

AU - Geng, Baisong

AU - Maserati, Lorenzo

AU - Crommie, Michael

AU - Wang, Feng

AU - Zettl, A.

PY - 2010/8/24

Y1 - 2010/8/24

N2 - We demonstrate a process for batch production of large-area (100-3000 μrn2) patterned freestanding graphene membranes on Cu scaffolds using chemical vapor deposition (CVD)-grown graphene. This technique avoids the use of silicon and transfers of graphene. As one application of this technique, we fabricate transmission electron microscopy (TEM) sample supports. TEM characterization of the graphene membranes reveals relatively clean, highly TEM-transparent, single-layer graphene regions (∼50% by area) and, despite the polycrystalline nature of CVD graphene, membrane yields as high as 75-100%. This high yield verifies that the intrinsic strength and integrity of CVD-grown graphene films is sufficient for sub-100 μm width membrane applications. Elemental analysis (electron energy loss spectroscopy (EELS) and X-ray energy-dispersive spectroscopy (EDS)) of the graphene membranes reveals some nanoscaled contamination left over from the etching process, and we suggest several ways to reduce this contamination and improve the quality of the graphene for electronic device applications. This large-scale production of suspended graphene membranes facilitates access to the two-dimensional physics of graphene that are suppressed by substrate interactions and enables the widespread use of graphene-based sample supports for electron and optical microscopy.

AB - We demonstrate a process for batch production of large-area (100-3000 μrn2) patterned freestanding graphene membranes on Cu scaffolds using chemical vapor deposition (CVD)-grown graphene. This technique avoids the use of silicon and transfers of graphene. As one application of this technique, we fabricate transmission electron microscopy (TEM) sample supports. TEM characterization of the graphene membranes reveals relatively clean, highly TEM-transparent, single-layer graphene regions (∼50% by area) and, despite the polycrystalline nature of CVD graphene, membrane yields as high as 75-100%. This high yield verifies that the intrinsic strength and integrity of CVD-grown graphene films is sufficient for sub-100 μm width membrane applications. Elemental analysis (electron energy loss spectroscopy (EELS) and X-ray energy-dispersive spectroscopy (EDS)) of the graphene membranes reveals some nanoscaled contamination left over from the etching process, and we suggest several ways to reduce this contamination and improve the quality of the graphene for electronic device applications. This large-scale production of suspended graphene membranes facilitates access to the two-dimensional physics of graphene that are suppressed by substrate interactions and enables the widespread use of graphene-based sample supports for electron and optical microscopy.

UR - http://www.scopus.com/inward/record.url?scp=78650159195&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78650159195&partnerID=8YFLogxK

U2 - 10.1021/nn100459u

DO - 10.1021/nn100459u

M3 - Article

C2 - 20604526

AN - SCOPUS:78650159195

VL - 4

SP - 4762

EP - 4768

JO - ACS Nano

JF - ACS Nano

SN - 1936-0851

IS - 8

ER -

Alemán B, Regan W, Aloni S, Altoe V, Alem N, Girit C et al. Transfer-free batch fabrication of large- Area suspended graphene membranes. ACS nano. 2010 Aug 24;4(8):4762-4768. https://doi.org/10.1021/nn100459u