Transfer of monolayer TMD WS 2 and Raman study of substrate effects

Jerome T. Mlack, Paul Masih Das, Gopinath Danda, Yung Chien Chou, Carl H. Naylor, Zhong Lin, Néstor Perea López, Tianyi Zhang, Mauricio Terrones, A. T.Charlie Johnson, Marija Drndic

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Abstract

A facile transfer process for transition metal dichalcogenide WS 2 flakes is reported and the effect of the underlying substrate on the flake properties is investigated using Raman spectroscopy. The flakes are transferred from their growth substrate using polymethyl methacrylate (PMMA) and a wet etch to allow the user to transfer the flakes to a final substrate using a microscope and micromanipulator combined with semi-Transparent Kapton tape. The substrates used range from insulators such as industry standard high-k dielectric HfO 2 and "green polymer" parylene-C, to conducting chemical vapor deposition (CVD) grown graphene. Raman spectroscopy is used first to confirm the material quality of the transferred flakes to the substrates and subsequently to analyze and separate the effects arising from material transfer from those arising from interactions with the substrate. We observe changes in the Raman spectra associated with the interactions between the substrates in the flakes. These interactions affect both in-plane and out-of-plane modes in different ways depending on their sources, for example strain or surface charge. These changes vary with final substrate, with the strongest effects being observed for WS 2 transferred onto graphene and HfO 2, demonstrating the importance of understanding substrate interaction for fabrication of future devices.

Original languageEnglish (US)
Article number43037
JournalScientific reports
Volume7
DOIs
StatePublished - Feb 21 2017

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Raman Spectrum Analysis
Polymethyl Methacrylate
Industry
Polymers
Metals
Equipment and Supplies
Growth
parylene

All Science Journal Classification (ASJC) codes

  • General

Cite this

Mlack, J. T., Masih Das, P., Danda, G., Chou, Y. C., Naylor, C. H., Lin, Z., ... Drndic, M. (2017). Transfer of monolayer TMD WS 2 and Raman study of substrate effects. Scientific reports, 7, [43037]. https://doi.org/10.1038/srep43037
Mlack, Jerome T. ; Masih Das, Paul ; Danda, Gopinath ; Chou, Yung Chien ; Naylor, Carl H. ; Lin, Zhong ; López, Néstor Perea ; Zhang, Tianyi ; Terrones, Mauricio ; Johnson, A. T.Charlie ; Drndic, Marija. / Transfer of monolayer TMD WS 2 and Raman study of substrate effects. In: Scientific reports. 2017 ; Vol. 7.
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Mlack, JT, Masih Das, P, Danda, G, Chou, YC, Naylor, CH, Lin, Z, López, NP, Zhang, T, Terrones, M, Johnson, ATC & Drndic, M 2017, 'Transfer of monolayer TMD WS 2 and Raman study of substrate effects', Scientific reports, vol. 7, 43037. https://doi.org/10.1038/srep43037

Transfer of monolayer TMD WS 2 and Raman study of substrate effects. / Mlack, Jerome T.; Masih Das, Paul; Danda, Gopinath; Chou, Yung Chien; Naylor, Carl H.; Lin, Zhong; López, Néstor Perea; Zhang, Tianyi; Terrones, Mauricio; Johnson, A. T.Charlie; Drndic, Marija.

In: Scientific reports, Vol. 7, 43037, 21.02.2017.

Research output: Contribution to journalArticle

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Mlack JT, Masih Das P, Danda G, Chou YC, Naylor CH, Lin Z et al. Transfer of monolayer TMD WS 2 and Raman study of substrate effects. Scientific reports. 2017 Feb 21;7. 43037. https://doi.org/10.1038/srep43037