Abstract
The design and performance of a low-energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 μA beam of Ar+ ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space-charge diverging beam along the 44-cm path to the target. The ion optics have been optimized by the use of a new simulation program, chden, which can model a series of lenses and the effects of space-charge forces.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1294-1302 |
| Number of pages | 9 |
| Journal | Review of Scientific Instruments |
| Volume | 59 |
| Issue number | 8 |
| DOIs | |
| State | Published - Dec 1 1988 |
All Science Journal Classification (ASJC) codes
- Instrumentation
- Physics and Astronomy (miscellaneous)
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Cite this
Malafsky, G. P., & Winograd, N. (1988). Transport optics for a space-charge broadening ion beam. Review of Scientific Instruments, 59(8), 1294-1302. https://doi.org/10.1063/1.1139712