Tri-layer PEALD ZnO thin film transistors and circuits

Yuanyuan V. Li, Kaige G. Sun, J. Israel Ramirez, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publication71st Device Research Conference, DRC 2013 - Conference Digest
Pages167-168
Number of pages2
DOIs
StatePublished - Dec 16 2013
Event71st Device Research Conference, DRC 2013 - Notre Dame, IN, United States
Duration: Jun 23 2013Jun 26 2013

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Other

Other71st Device Research Conference, DRC 2013
CountryUnited States
CityNotre Dame, IN
Period6/23/136/26/13

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Li, Y. V., Sun, K. G., Ramirez, J. I., & Jackson, T. N. (2013). Tri-layer PEALD ZnO thin film transistors and circuits. In 71st Device Research Conference, DRC 2013 - Conference Digest (pp. 167-168). [6633846] (Device Research Conference - Conference Digest, DRC). https://doi.org/10.1109/DRC.2013.6633846