Tri-layer PEALD ZnO thin film transistors and circuits

Yuanyuan V. Li, Kaige G. Sun, J. Israel Ramirez, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Original languageEnglish (US)
Title of host publication71st Device Research Conference, DRC 2013 - Conference Digest
Pages167-168
Number of pages2
DOIs
StatePublished - Dec 16 2013
Event71st Device Research Conference, DRC 2013 - Notre Dame, IN, United States
Duration: Jun 23 2013Jun 26 2013

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Other

Other71st Device Research Conference, DRC 2013
CountryUnited States
CityNotre Dame, IN
Period6/23/136/26/13

Fingerprint

Thin film circuits
Thin film transistors

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Li, Y. V., Sun, K. G., Ramirez, J. I., & Jackson, T. N. (2013). Tri-layer PEALD ZnO thin film transistors and circuits. In 71st Device Research Conference, DRC 2013 - Conference Digest (pp. 167-168). [6633846] (Device Research Conference - Conference Digest, DRC). https://doi.org/10.1109/DRC.2013.6633846
Li, Yuanyuan V. ; Sun, Kaige G. ; Ramirez, J. Israel ; Jackson, Thomas Nelson. / Tri-layer PEALD ZnO thin film transistors and circuits. 71st Device Research Conference, DRC 2013 - Conference Digest. 2013. pp. 167-168 (Device Research Conference - Conference Digest, DRC).
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title = "Tri-layer PEALD ZnO thin film transistors and circuits",
author = "Li, {Yuanyuan V.} and Sun, {Kaige G.} and Ramirez, {J. Israel} and Jackson, {Thomas Nelson}",
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doi = "10.1109/DRC.2013.6633846",
language = "English (US)",
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Li, YV, Sun, KG, Ramirez, JI & Jackson, TN 2013, Tri-layer PEALD ZnO thin film transistors and circuits. in 71st Device Research Conference, DRC 2013 - Conference Digest., 6633846, Device Research Conference - Conference Digest, DRC, pp. 167-168, 71st Device Research Conference, DRC 2013, Notre Dame, IN, United States, 6/23/13. https://doi.org/10.1109/DRC.2013.6633846

Tri-layer PEALD ZnO thin film transistors and circuits. / Li, Yuanyuan V.; Sun, Kaige G.; Ramirez, J. Israel; Jackson, Thomas Nelson.

71st Device Research Conference, DRC 2013 - Conference Digest. 2013. p. 167-168 6633846 (Device Research Conference - Conference Digest, DRC).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Li YV, Sun KG, Ramirez JI, Jackson TN. Tri-layer PEALD ZnO thin film transistors and circuits. In 71st Device Research Conference, DRC 2013 - Conference Digest. 2013. p. 167-168. 6633846. (Device Research Conference - Conference Digest, DRC). https://doi.org/10.1109/DRC.2013.6633846