Two-dimensional MEMS array for maskless lithography and wavefront modulation

D. López, V. A. Aksyuk, G. P. Watson, W. M. Mansfield, R. Cirelli, F. Klemens, F. Pardo, E. Ferry, J. Miner, T. W. Sorsch, M. Peabody, J. Bower, M. Peabody, C. S. Pai, J. Gates

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

We review the fabrication process of a recently introduced phase only MEMS based spatial light modulators for maskless lithography. A brief description of this device is presented. The physical properties of its structural layers and the difficulties encountered during its fabrication process are described in detail.

Original languageEnglish (US)
Title of host publicationSmart Sensors, Actuators, and MEMS III
DOIs
StatePublished - 2007
EventSmart Sensors, Actuators, and MEMS III - Maspalomas, Gran Canaria, Spain
Duration: May 2 2007May 4 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6589
ISSN (Print)0277-786X

Conference

ConferenceSmart Sensors, Actuators, and MEMS III
CountrySpain
CityMaspalomas, Gran Canaria
Period5/2/075/4/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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