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Two-dimensional MEMS array for maskless lithography and wavefront modulation
D. López, V. A. Aksyuk, G. P. Watson, W. M. Mansfield, R. Cirelli, F. Klemens, F. Pardo, E. Ferry, J. Miner, T. W. Sorsch, M. Peabody, J. Bower, M. Peabody, C. S. Pai, J. Gates
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
10
Scopus
citations