Two dimensional MEMS piston array for DUV optical pattern generation

D. López, V. Aksyuk, G. Watson, M. E. Simon, W. Mansfield, F. Klemens, R. Cirelli, E. Ferry, A. Papazian, F. Pardo, C. Bolle, N. Basavanhally, J. Bower, J. Miner, T. Sorsch, D. Tennant

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Abstract

We describe the design, fabrication and dynamics of a two dimensional array of MEMS piston mirrors that fulfill the requirements needed to modulate Deep Ultraviolet radiation for maskless pattern generation.

Original languageEnglish (US)
Title of host publicationIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PublisherIEEE Computer Society
Pages148-149
Number of pages2
ISBN (Print)078039562X, 9780780395626
DOIs
StatePublished - 2006
EventIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
Duration: Aug 21 2006Aug 24 2006

Publication series

NameIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
CountryUnited States
CityBig Sky, MT
Period8/21/068/24/06

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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