Two dimensional MEMS piston array for DUV optical pattern generation

D. López, V. Aksyuk, G. Watson, M. E. Simon, W. Mansfield, F. Klemens, R. Cirelli, E. Ferry, A. Papazian, F. Pardo, C. Bolle, N. Basavanhally, J. Bower, J. Miner, T. Sorsch, D. Tennant

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

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