Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization

Nishit Goel, Stephen Bart, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel and highly sensitive vacuum gauge based on a micromachined AT-cut quartz bulk acoustic wave (BAW) resonator diaphragm is presented. Pressure is sensed by monitoring frequency shifts of these resonators due to the sensor's diaphragm bending. The sensors show a large dynamic range of 1 mTorr-760 Torr with a resolution ∼1.06 mTorr for 82.4 MHz resonators with a high linearity. Here we report on the parametric study to improve sensitivity of these sensors.

Original languageEnglish (US)
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781509010127
DOIs
StatePublished - Dec 21 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: Oct 30 2017Nov 1 2017

Publication series

NameProceedings of IEEE Sensors
Volume2017-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Other

Other16th IEEE SENSORS Conference, ICSENS 2017
CountryUnited Kingdom
CityGlasgow
Period10/30/1711/1/17

Fingerprint

Vacuum gages
Resonators
Acoustic waves
Diaphragms
Sensors
Quartz
Monitoring

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Goel, N., Bart, S., & Tadigadapa, S. A. (2017). Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. In IEEE SENSORS 2017 - Conference Proceedings (pp. 1-3). (Proceedings of IEEE Sensors; Vol. 2017-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2017.8234417
Goel, Nishit ; Bart, Stephen ; Tadigadapa, Srinivas A. / Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. IEEE SENSORS 2017 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-3 (Proceedings of IEEE Sensors).
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Goel, N, Bart, S & Tadigadapa, SA 2017, Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. in IEEE SENSORS 2017 - Conference Proceedings. Proceedings of IEEE Sensors, vol. 2017-December, Institute of Electrical and Electronics Engineers Inc., pp. 1-3, 16th IEEE SENSORS Conference, ICSENS 2017, Glasgow, United Kingdom, 10/30/17. https://doi.org/10.1109/ICSENS.2017.8234417

Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. / Goel, Nishit; Bart, Stephen; Tadigadapa, Srinivas A.

IEEE SENSORS 2017 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-3 (Proceedings of IEEE Sensors; Vol. 2017-December).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Goel N, Bart S, Tadigadapa SA. Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. In IEEE SENSORS 2017 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-3. (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2017.8234417