Large-area few-layer MoS2 films with tunable thicknesses are synthesized via a two-step method, which consists of e-beam evaporation of a metal and a subsequent sulfurization process operating at atmospheric pressure. The Fabry�Perot (F�P) pressure sensor, exhibiting high sensitivity, is assembled by transferring as-grown MoS2 films onto the end faces of ceramic ferrules. The sensor displays a high deflection sensitivity of 89.3 nm Pa-1 at low acoustic pressure, which is three orders of magnitude higher than those found in conventional diaphragm materials.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering