Ultrasensitive Pressure Detection of Few-Layer MoS2

Feifan Yu, Qianwen Liu, Xin Gan, Mingxiang Hu, Tianyi Zhang, Cheng Li, Feiyu Kang, Mauricio Terrones, Ruitao Lv

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Large-area few-layer MoS2 films with tunable thicknesses are synthesized via a two-step method, which consists of e-beam evaporation of a metal and a subsequent sulfurization process operating at atmospheric pressure. The Fabry�Perot (F�P) pressure sensor, exhibiting high sensitivity, is assembled by transferring as-grown MoS2 films onto the end faces of ceramic ferrules. The sensor displays a high deflection sensitivity of 89.3 nm Pa-1 at low acoustic pressure, which is three orders of magnitude higher than those found in conventional diaphragm materials.

Original languageEnglish (US)
Article number1603266
JournalAdvanced Materials
Issue number4
StatePublished - Jan 1 2017

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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    Yu, F., Liu, Q., Gan, X., Hu, M., Zhang, T., Li, C., Kang, F., Terrones, M., & Lv, R. (2017). Ultrasensitive Pressure Detection of Few-Layer MoS2 Advanced Materials, 29(4), [1603266]. https://doi.org/10.1002/adma.201603266