Ultrasensitive Pressure Detection of Few-Layer MoS2

Feifan Yu, Qianwen Liu, Xin Gan, Mingxiang Hu, Tianyi Zhang, Cheng Li, Feiyu Kang, Mauricio Terrones, Ruitao Lv

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

Large-area few-layer MoS2 films with tunable thicknesses are synthesized via a two-step method, which consists of e-beam evaporation of a metal and a subsequent sulfurization process operating at atmospheric pressure. The Fabry�Perot (F�P) pressure sensor, exhibiting high sensitivity, is assembled by transferring as-grown MoS2 films onto the end faces of ceramic ferrules. The sensor displays a high deflection sensitivity of 89.3 nm Pa-1 at low acoustic pressure, which is three orders of magnitude higher than those found in conventional diaphragm materials.

Original languageEnglish (US)
Article number1603266
JournalAdvanced Materials
Volume29
Issue number4
DOIs
StatePublished - Jan 1 2017

Fingerprint

Pressure sensors
Diaphragms
Atmospheric pressure
Evaporation
Acoustics
Metals
Sensors

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Yu, F., Liu, Q., Gan, X., Hu, M., Zhang, T., Li, C., ... Lv, R. (2017). Ultrasensitive Pressure Detection of Few-Layer MoS2 Advanced Materials, 29(4), [1603266]. https://doi.org/10.1002/adma.201603266
Yu, Feifan ; Liu, Qianwen ; Gan, Xin ; Hu, Mingxiang ; Zhang, Tianyi ; Li, Cheng ; Kang, Feiyu ; Terrones, Mauricio ; Lv, Ruitao. / Ultrasensitive Pressure Detection of Few-Layer MoS2 In: Advanced Materials. 2017 ; Vol. 29, No. 4.
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Yu, F, Liu, Q, Gan, X, Hu, M, Zhang, T, Li, C, Kang, F, Terrones, M & Lv, R 2017, 'Ultrasensitive Pressure Detection of Few-Layer MoS2 ', Advanced Materials, vol. 29, no. 4, 1603266. https://doi.org/10.1002/adma.201603266

Ultrasensitive Pressure Detection of Few-Layer MoS2 . / Yu, Feifan; Liu, Qianwen; Gan, Xin; Hu, Mingxiang; Zhang, Tianyi; Li, Cheng; Kang, Feiyu; Terrones, Mauricio; Lv, Ruitao.

In: Advanced Materials, Vol. 29, No. 4, 1603266, 01.01.2017.

Research output: Contribution to journalArticle

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AU - Yu, Feifan

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AU - Kang, Feiyu

AU - Terrones, Mauricio

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AB - Large-area few-layer MoS2 films with tunable thicknesses are synthesized via a two-step method, which consists of e-beam evaporation of a metal and a subsequent sulfurization process operating at atmospheric pressure. The Fabry�Perot (F�P) pressure sensor, exhibiting high sensitivity, is assembled by transferring as-grown MoS2 films onto the end faces of ceramic ferrules. The sensor displays a high deflection sensitivity of 89.3 nm Pa-1 at low acoustic pressure, which is three orders of magnitude higher than those found in conventional diaphragm materials.

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Yu F, Liu Q, Gan X, Hu M, Zhang T, Li C et al. Ultrasensitive Pressure Detection of Few-Layer MoS2 Advanced Materials. 2017 Jan 1;29(4). 1603266. https://doi.org/10.1002/adma.201603266