Recent requirements for micro motors in popular applications such as cellular phones, digital cameras, laptop computers etc. have accelerated the need for simple and compact piezoelectric ultrasonic motor development. In addition, the sub-micron motion of ultrasonic motors makes them strong candidates for precise positioning applications. For example, optical fiber alignment, which is currently a major issue for the optoelectronics industry, is the target of this investigation. In this work, compact and precise bimorph structures with delta-shaped piezoelectric ultrasonic motors are fabricated with low temperature co-fired ceramics (LTCC). Based on a low temperature sinterable, high power piezoelectric composition, a 2-degrees of freedom ultrasonic motor was cofired a with commercial LTCC green tape system at 900 °C. To obtain 2-degrees of freedom motion after a cofiring process, two delta-shaped motors were sandwiched together with four input electrodes. The delta-shaped motor was driven by double phases (sine and cosine voltages) for the x, y and diagonal axis movement. Fabricated motor size was below 1 cm 2 and showed sub micron range motion in 2-dimensional space. This motor was integrated into an LTCC substrate to produce an optical fiber alignment package. Details of the structure, driving circuit and functionality will be discussed in this article.