Ultrathin slices of ferroelectric domain-patterned lithium niobate by crystal ion slicing

David A. Scrymgeour, Venkatraman Gopalan, Tony E. Haynes, Miguel Levy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We report the successful fabrication of 6 μm thick slices from a ferroelectric domain microengineered LiNbO3 wafer device using the crystal ion slicing technique. The device was created by micropatterning ferroelectric domains in a bulk 0.3 mm thick wafer of z-cut LiNbO3, followed by ion-implanting with 3.8 MeV He+ ions to a fluence 5 × 10+16 ions/cm2 to create a damage layer at a well defined depth from the surface. Etching away this damaged layer in dilute hydrofluoric acid results in a liftoff of the top slice in which the ferroelectric domain patterns are left intact. The influence of annealing conditions on liftoff time and depth of etch lines was studied. Helium-Neon laser light was successfully coupled into the device. Due to unintentional breakage of the polished input and output faces, the electro-optic scanning performance has not been characterized so far.

Original languageEnglish (US)
Title of host publicationWafer Bonding and Thinning Techniques for Materials Integration
Pages121-126
Number of pages6
StatePublished - Dec 1 2001
Event2001 MRS Spring Meeting - San Franciso, CA, United States
Duration: Apr 16 2001Apr 20 2001

Publication series

NameMaterials Research Society Symposium Proceedings
Volume681
ISSN (Print)0272-9172

Other

Other2001 MRS Spring Meeting
CountryUnited States
CitySan Franciso, CA
Period4/16/014/20/01

Fingerprint

Ferroelectric materials
Lithium
Ions
Crystals
Helium neon lasers
Hydrofluoric Acid
Hydrofluoric acid
Electrooptical effects
Etching
Annealing
Scanning
Fabrication
lithium niobate

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Scrymgeour, D. A., Gopalan, V., Haynes, T. E., & Levy, M. (2001). Ultrathin slices of ferroelectric domain-patterned lithium niobate by crystal ion slicing. In Wafer Bonding and Thinning Techniques for Materials Integration (pp. 121-126). (Materials Research Society Symposium Proceedings; Vol. 681).
Scrymgeour, David A. ; Gopalan, Venkatraman ; Haynes, Tony E. ; Levy, Miguel. / Ultrathin slices of ferroelectric domain-patterned lithium niobate by crystal ion slicing. Wafer Bonding and Thinning Techniques for Materials Integration. 2001. pp. 121-126 (Materials Research Society Symposium Proceedings).
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Scrymgeour, DA, Gopalan, V, Haynes, TE & Levy, M 2001, Ultrathin slices of ferroelectric domain-patterned lithium niobate by crystal ion slicing. in Wafer Bonding and Thinning Techniques for Materials Integration. Materials Research Society Symposium Proceedings, vol. 681, pp. 121-126, 2001 MRS Spring Meeting, San Franciso, CA, United States, 4/16/01.

Ultrathin slices of ferroelectric domain-patterned lithium niobate by crystal ion slicing. / Scrymgeour, David A.; Gopalan, Venkatraman; Haynes, Tony E.; Levy, Miguel.

Wafer Bonding and Thinning Techniques for Materials Integration. 2001. p. 121-126 (Materials Research Society Symposium Proceedings; Vol. 681).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - We report the successful fabrication of 6 μm thick slices from a ferroelectric domain microengineered LiNbO3 wafer device using the crystal ion slicing technique. The device was created by micropatterning ferroelectric domains in a bulk 0.3 mm thick wafer of z-cut LiNbO3, followed by ion-implanting with 3.8 MeV He+ ions to a fluence 5 × 10+16 ions/cm2 to create a damage layer at a well defined depth from the surface. Etching away this damaged layer in dilute hydrofluoric acid results in a liftoff of the top slice in which the ferroelectric domain patterns are left intact. The influence of annealing conditions on liftoff time and depth of etch lines was studied. Helium-Neon laser light was successfully coupled into the device. Due to unintentional breakage of the polished input and output faces, the electro-optic scanning performance has not been characterized so far.

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Scrymgeour DA, Gopalan V, Haynes TE, Levy M. Ultrathin slices of ferroelectric domain-patterned lithium niobate by crystal ion slicing. In Wafer Bonding and Thinning Techniques for Materials Integration. 2001. p. 121-126. (Materials Research Society Symposium Proceedings).