Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates

Albert Queraltó, Angel Pérez Del Pino, María De La Mata, Mar Tristany, Xavier Obradors, Teresa Puig, Susan Trolier-McKinstry

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this work, Ba0.8Sr0.2TiO3 (BST) films on LaNiO3-buffered SiO2/Si (LNO/SiO2/Si) substrates were crystallized by pulsed laser irradiation. Solution-derived amorphous barium-strontium-titanate precursor layers were crystallized with a KrF excimer laser in oxygen ambient at fluences ranging from 50 to 75 mJ cm-2. With the substrate temperature set to 500 °C, the number of pulses and film thickness were varied until high-quality crystallinity could be achieved. It was found that films with a thickness of 40 nm are fully crystallized with a uniaxial {00l} orientation which is predetermined by the LaNiO3 orientation. On the other hand, for 160 nm thick films, crystallization was observed after 12,000 pulses in the 70 nm close to the surface, while the rest of the film remained amorphous. The large temperature difference between the film surface and interface due to the low thermal conductivity of the amorphous BST is suggested as the origin of this behavior. Films thicker than 80 nm cracked on crystallization due to the stress caused by the different thermal expansion coefficients of film and substrate, as well as the large temperature variations within the BST film.

Original languageEnglish (US)
Pages (from-to)4039-4047
Number of pages9
JournalCeramics International
Volume42
Issue number3
DOIs
StatePublished - Feb 15 2016

Fingerprint

Ultraviolet lasers
Silicon
Crystallization
Pulsed lasers
Substrates
Thick films
Barium strontium titanate
Excimer lasers
Amorphous films
Laser beam effects
Temperature
Thermal expansion
Film thickness
Thermal conductivity
Oxygen

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Queraltó, Albert ; Pérez Del Pino, Angel ; De La Mata, María ; Tristany, Mar ; Obradors, Xavier ; Puig, Teresa ; Trolier-McKinstry, Susan. / Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates. In: Ceramics International. 2016 ; Vol. 42, No. 3. pp. 4039-4047.
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Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates. / Queraltó, Albert; Pérez Del Pino, Angel; De La Mata, María; Tristany, Mar; Obradors, Xavier; Puig, Teresa; Trolier-McKinstry, Susan.

In: Ceramics International, Vol. 42, No. 3, 15.02.2016, p. 4039-4047.

Research output: Contribution to journalArticle

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T1 - Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates

AU - Queraltó, Albert

AU - Pérez Del Pino, Angel

AU - De La Mata, María

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AU - Obradors, Xavier

AU - Puig, Teresa

AU - Trolier-McKinstry, Susan

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Queraltó A, Pérez Del Pino A, De La Mata M, Tristany M, Obradors X, Puig T et al. Ultraviolet pulsed laser crystallization of Ba0.8Sr0.2TiO3 films on LaNiO3-coated silicon substrates. Ceramics International. 2016 Feb 15;42(3):4039-4047. https://doi.org/10.1016/j.ceramint.2015.11.075