UV-curable polymers with chemically bonded carbon nanotubes for MEMS applications

Jining Xie, Nanyan Zhang, Manton John Guers, Vijay K. Varadan

Research output: Contribution to journalConference articlepeer-review

Abstract

Current ultraviolet (UV) curable polymer techniques for MEMS fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified three-step in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy (XPS) was used to identify the -OH and -COOH groups attached to nanotube surface. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between -NCO groups of TDI and -OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared (FTIR) spectra. This new UV-curable polymer is expected to be a cost-effective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.

Original languageEnglish (US)
Pages (from-to)515-525
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4935
DOIs
StatePublished - Dec 1 2002
EventSmart Structures, Devices, and Systems - Melbourne, VIC., Australia
Duration: Dec 16 2002Dec 18 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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