Vapor-Deposition Techniques

Raúl J. Martín-Palma, Akhlesh Lakhtakia

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

The term vapor deposition encompasses a large palette of techniques essential for both the reproduction of certain structural features of a biotemplate and the replication of a biotemplate. Physical vapor deposition, chemical vapor deposition, atomic layer deposition, and molecular beam epitaxy are succinctly described in this chapter in the context of engineered biomimicry.

Original languageEnglish (US)
Title of host publicationEngineered Biomimicry
PublisherElsevier Inc.
Pages383-398
Number of pages16
ISBN (Print)9780124159952
DOIs
StatePublished - Jan 1 2013

Fingerprint

Vapor deposition
Atomic layer deposition
Physical vapor deposition
Molecular beam epitaxy
Reproduction
Chemical vapor deposition

All Science Journal Classification (ASJC) codes

  • Biochemistry, Genetics and Molecular Biology(all)

Cite this

Martín-Palma, R. J., & Lakhtakia, A. (2013). Vapor-Deposition Techniques. In Engineered Biomimicry (pp. 383-398). Elsevier Inc.. https://doi.org/10.1016/B978-0-12-415995-2.00015-5
Martín-Palma, Raúl J. ; Lakhtakia, Akhlesh. / Vapor-Deposition Techniques. Engineered Biomimicry. Elsevier Inc., 2013. pp. 383-398
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Martín-Palma, RJ & Lakhtakia, A 2013, Vapor-Deposition Techniques. in Engineered Biomimicry. Elsevier Inc., pp. 383-398. https://doi.org/10.1016/B978-0-12-415995-2.00015-5

Vapor-Deposition Techniques. / Martín-Palma, Raúl J.; Lakhtakia, Akhlesh.

Engineered Biomimicry. Elsevier Inc., 2013. p. 383-398.

Research output: Chapter in Book/Report/Conference proceedingChapter

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Martín-Palma RJ, Lakhtakia A. Vapor-Deposition Techniques. In Engineered Biomimicry. Elsevier Inc. 2013. p. 383-398 https://doi.org/10.1016/B978-0-12-415995-2.00015-5