VERTICAL SHORT GATE FET STRUCTURE.

Research output: Contribution to journalArticlepeer-review

Abstract

A vertical short gate GaAs FET structure is constructed. The main manufacturing steps are briefly outlined.

Original languageEnglish (US)
Pages (from-to)6418-6420
Number of pages3
JournalIBM technical disclosure bulletin
Volume25
Issue number12
StatePublished - Jan 1 1983

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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