Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

Byron Knapp, Dan Oss, Dave Arneson, Mel Liebers, Eric Russell Marsh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2012 Summer Topical Meeting
Subtitle of host publicationPrecision Engineering and Mechatronics Supporting the Semiconductor Industry
Pages45-48
Number of pages4
StatePublished - Dec 1 2012
EventASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry - Berkeley, CA, United States
Duration: Jun 24 2012Jun 26 2012

Publication series

NameProceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry
Volume53

Other

OtherASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry
CountryUnited States
CityBerkeley, CA
Period6/24/126/26/12

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

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