Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

Byron Knapp, Dan Oss, Dave Arneson, Mel Liebers, Eric Russell Marsh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2012 Summer Topical Meeting
Subtitle of host publicationPrecision Engineering and Mechatronics Supporting the Semiconductor Industry
Pages45-48
Number of pages4
StatePublished - Dec 1 2012
EventASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry - Berkeley, CA, United States
Duration: Jun 24 2012Jun 26 2012

Publication series

NameProceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry
Volume53

Other

OtherASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry
CountryUnited States
CityBerkeley, CA
Period6/24/126/26/12

Fingerprint

Bearings (structural)
Air

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

Cite this

Knapp, B., Oss, D., Arneson, D., Liebers, M., & Marsh, E. R. (2012). Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. In Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry (pp. 45-48). (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry; Vol. 53).
Knapp, Byron ; Oss, Dan ; Arneson, Dave ; Liebers, Mel ; Marsh, Eric Russell. / Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. 2012. pp. 45-48 (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry).
@inproceedings{d0114bbfbf73481fabc98497c53486b1,
title = "Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles",
author = "Byron Knapp and Dan Oss and Dave Arneson and Mel Liebers and Marsh, {Eric Russell}",
year = "2012",
month = "12",
day = "1",
language = "English (US)",
isbn = "9781887706605",
series = "Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry",
pages = "45--48",
booktitle = "Proceedings - ASPE 2012 Summer Topical Meeting",

}

Knapp, B, Oss, D, Arneson, D, Liebers, M & Marsh, ER 2012, Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. in Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry, vol. 53, pp. 45-48, ASPE 2012 Summer Topical Meeting on Precision Engineering and Mechatronics Suporting the Semiconductor Industry, Berkeley, CA, United States, 6/24/12.

Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. / Knapp, Byron; Oss, Dan; Arneson, Dave; Liebers, Mel; Marsh, Eric Russell.

Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. 2012. p. 45-48 (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry; Vol. 53).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles

AU - Knapp, Byron

AU - Oss, Dan

AU - Arneson, Dave

AU - Liebers, Mel

AU - Marsh, Eric Russell

PY - 2012/12/1

Y1 - 2012/12/1

UR - http://www.scopus.com/inward/record.url?scp=84884319030&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84884319030&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84884319030

SN - 9781887706605

T3 - Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry

SP - 45

EP - 48

BT - Proceedings - ASPE 2012 Summer Topical Meeting

ER -

Knapp B, Oss D, Arneson D, Liebers M, Marsh ER. Vibration spectra and asynchronous error motion of ultra-precision air bearing spindles. In Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry. 2012. p. 45-48. (Proceedings - ASPE 2012 Summer Topical Meeting: Precision Engineering and Mechatronics Supporting the Semiconductor Industry).