Virtual production lines design for back-end semiconductor manufacturing systems

Ying Tang, Meng Chu Zhou, Robin G. Qiu

Research output: Contribution to journalArticle

19 Scopus citations

Abstract

This paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system.

Original languageEnglish (US)
Pages (from-to)543-550
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume16
Issue number3
DOIs
StatePublished - Aug 1 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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